Art

J-GLOBAL ID：201802250826047742   Reference number：18A0017909

Size measurements of standard nanoparticles using metrological atomic force microscope and evaluation of their uncertainties

計測学的原子間力顕微鏡を用いた標準ナノ粒子のサイズ測定とその不確実性の評価【Powered by NICT】

Author (5)： Misumi Ichiko (National Metrology Institute of Japan (NMIJ), National Institute of Advanced Industrial Science and Technology (AIST), Central 3 bldg., 1-1-1 Umezono, Tsukuba, Ibaraki 305-8563 Japan) ,  Sugawara Kentaro (National Metrology Institute of Japan (NMIJ), National Institute of Advanced Industrial Science and Technology (AIST), Central 3 bldg., 1-1-1 Umezono, Tsukuba, Ibaraki 305-8563 Japan) ,  Takahata Keiji (National Metrology Institute of Japan (NMIJ), National Institute of Advanced Industrial Science and Technology (AIST), Central 3 bldg., 1-1-1 Umezono, Tsukuba, Ibaraki 305-8563 Japan) ,  Takahashi Kayori (National Metrology Institute of Japan (NMIJ), National Institute of Advanced Industrial Science and Technology (AIST), Central 3 bldg., 1-1-1 Umezono, Tsukuba, Ibaraki 305-8563 Japan) ,  Ehara Kensei (National Metrology Institute of Japan (NMIJ), National Institute of Advanced Industrial Science and Technology (AIST), Central 3 bldg., 1-1-1 Umezono, Tsukuba, Ibaraki 305-8563 Japan)
Material： Precision Engineering  (Precis Eng)
Volume： 51  Page： 691-701  Publication year： 2018 
JST Material Number： A0734B  ISSN： 0141-6359  Document type： Article
Article type： 原著論文  Country of issue： United States (USA)  Language： ENGLISH (EN)

Abstract/Point： Size measurement methods for p...

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Thesaurus term： laser interferometer ,  gas phase ,  *atomic force microscope ,  particle size distribution ,  microscopy ,  particle size(ratio) ,  gold ,  plastic deformation ,  silver ,  liquid phase ,  *nano particle ,  semiconductor industry ,  standard specimen ,  *uncertainty

Author keywords (5)： Metrological AFM ,  Particle size measurement ,  Uncertainty ,  Particle deformation ,  Plastic model

JST classification (1)： Measuring methods and instruments of length,area,cross section,volume,angle  (AD05020O)

Terms in the title (7)： 計測 ,  原子間力顕微鏡 ,  標準 ,  ナノ粒子 ,  サイズ測定 ,  不確実性 ,  評価