Art

J-GLOBAL ID：201802262588738079   Reference number：18A0795168

Characteristics of TiO₂ thin films surfaces treated by O₂ plasma in dielectric barrier discharge with the assistance of external heating

外部加熱の支援による誘電体バリア放電におけるO_2プラズマで処理したTiO_2薄膜表面の特性【JST・京大機械翻訳】

Author (7)： Kawakami Retsuo (Graduate School of Technology, Industrial and Social Sciences, Tokushima University, Tokushima, 770-8506, Japan) ,  Niibe Masahito (Laboratory of Advanced Science and Technology for Industry, University of Hyogo, Kamigori, Hyogo, 678-1205, Japan) ,  Nakano Yoshitaka (Chubu University, Kasugai, Aichi, 487-8501, Japan) ,  Araki Yuma (Laboratory of Advanced Science and Technology for Industry, University of Hyogo, Kamigori, Hyogo, 678-1205, Japan) ,  Yoshitani Yuki (Graduate School of Technology, Industrial and Social Sciences, Tokushima University, Tokushima, 770-8506, Japan) ,  Azuma Chisato (Graduate School of Technology, Industrial and Social Sciences, Tokushima University, Tokushima, 770-8506, Japan) ,  Mukai Takashi (Nichia Corporation, Anan, Tokushima, 774-0044, Japan)
Material： Vacuum
Volume： 152  Page： 265-271  Publication year： 2018 
JST Material Number： E0347A  ISSN： 0042-207X  Document type： Article
Article type： 原著論文  Country of issue： United Kingdom (GBR)  Language： ENGLISH (EN)

Abstract/Point： TiO₂ thin films wer...

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Thesaurus term： annealing (heat treatment) ,  plasma treatment ,  anatase ,  transition temperature ,  photoproduction ,  *plasma ,  nano particle ,  dyestuff ,  photolysis/photodisintegration ,  *thin film ,  optical absorption ,  potentiation ,  *silent discharge ,  photocatalytic activity ,  nitrogen heterocyclic compound ,  aromatic amine ,  sulfonium ,  sulfur heterocyclic compound ,  polynuclear aromatic compound ,  tertiary amine

Author keywords (5)： TiO₂ thin films ,  Heat-assisted O₂ dielectric barrier discharge plasma treatment ,  O₂ dielectric barrier discharge plasma treatment ,  O₂ gas annealing ,  Photocatalytic activity

JST classification (1)： Oxide thin films  (BK14050P)

Substance index (1)： Methylene blue

Terms in the title (4)： 支援 ,  誘電体バリア放電 ,  プラズマ ,  薄膜