Yoshitaka Nakano

ナカノヨシタカ | Yoshitaka Nakano

Affiliation and department：
Homepage URL (1)： https://www3.chubu.ac.jp/faculty/nakano_yoshitaka/#header

Research field (4)： Electronic devices and equipment , Thin-film surfaces and interfaces , Crystal engineering , Electric/electronic material engineering

Research keywords (10)：プラズマダメージ , プロセス技術・評価 , パワー半導体 , 窒化物半導体 , 電流コラプス , 結晶成長 , 欠陥準位 , AlGaN/GaN heterostructure , state-state photocapacitance spectroscopy , oxide semiconductors

Research theme for competitive and other funds (14)：

2022 - 2025 次世代パワー半導体β-Ga2O3の固有欠陥準位の全容解明
2019 - 2022 プラズマイオン衝撃により誘発されるp型GaNの電気的ダメージの全容解明研究課題
2016 - 2019 Si基板上AlGaN/GaNヘテロ構造の欠陥準位とスイッチング特性の相関解明研究課題
2014 - 2018 Elucidation of UV irradiation effect in plasma etching process of wide gap semiconductors
2014 - 2017 Investigation on hydrogen interaction with nitride-based semiconductor metal/semiconductor interfaces

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Papers (99)：

Retsuo Kawakami, Yuki Yoshitani, Kimiaki Mitani, Masahito Niibe, Yoshitaka Nakano, Chisato Azuma, Takashi Mukai. Effects of air-based nonequilibrium atmospheric pressure plasma jet treatment on characteristics of polypropylene film surfaces. Applied Surface Science. 2020. 509
Retsuo Kawakami, Masahito Niibe, Yoshitaka Nakano, Shin-ichiro Yanagiya, Yuki Yoshitani, Chisato Azuma, Takashi Mukai. Effects of ultraviolet wavelength and intensity on AlGaN thin film surfaces irradiated simultaneously with CF4 plasma and ultraviolet. Vacuum. 2019. 159. 45-50
Retsuo Kawakami, Masahito Niibe, Yoshitaka Nakano, Yuma Araki, Yuki Yoshitani, Chisato Azuma, Takashi Mukai. Characteristics of TiO2 thin films surfaces treated by O2 plasma in dielectric barrier discharge with the assistance of external heating. Vacuum. 2018. 152. 265-271
Yoshitaka Nakano. Deep-level defects in homoepitaxial p -type GaN. Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films. 2018. 36. 2
Retsuo Kawakami, Masahito Niibe, Yoshitaka Nakano, Ryo Tanaka, Chisato Azuma, Takashi Mukai. Characteristics of N-2 and O-2 Plasma-Induced Damages on AlGaN Thin Film Surfaces. PHYSICA STATUS SOLIDI A-APPLICATIONS AND MATERIALS SCIENCE. 2017. 214. 11

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MISC (161)：

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Patents (17)：

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Professional career (1)：

博士(工学)

Work history (4)：

2018/04 - 現在 Chubu University College of Engineering
2014/04 - 2018/03 Chubu University
2008/01 - 2014/03 Chubu University Institute of Science and Technology Research
1991/04 - 2007/12 豊田中央研究所研究員

Association Membership(s) (4)：

Electrochemical Society , American Vacuum Society , 日本表面真空学会 , THE JAPAN SOCIETY OF APPLIED PHYSICS

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