Art

J-GLOBAL ID：201802268290026673   Reference number：18A0969368

Numerical analysis of effects of ion-neutral collision processes on RF ICP discharge

RF ICP放電に及ぼすイオン-中性衝突過程の影響の数値解析【JST・京大機械翻訳】

Author (4)： Nishida K. (Graduate School of Science and Technology, Keio University, 3-14-1 Hiyoshi, Kouhoku-ku, Yokohama 223-8522, Japan) ,  Mattei S. (CERN, 1211 Geneva 23, Switzerland) ,  Lettry J. (CERN, 1211 Geneva 23, Switzerland) ,  Hatayama A. (Graduate School of Science and Technology, Keio University, 3-14-1 Hiyoshi, Kouhoku-ku, Yokohama 223-8522, Japan)
Material： Journal of Applied Physics  (Journal of General Physics and its Application to Other Sciences and to Industry)
Volume： 123  Issue： 4  Page： 043305-043305-10  Publication year： 2018 
JST Material Number： C0266A  ISSN： 0021-8979  CODEN： JAPIAU  Document type： Article
Article type： 原著論文  Country of issue： United States (USA)  Language： ENGLISH (EN)

Abstract/Point： The discharge process of a rad...

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Thesaurus term： *numerical analysis ,  rate theory ,  inductively coupled plasma ,  *electric discharge ,  modeling ,  HF ,  plasma ,  neutral particle ,  H mode plasma confinement ,  mode transition ,  *collision process ,  *neutral

JST classification (2)： Gas discharges  (BJ03020T) ,  Plasma in general  (BJ02010B)

Terms in the title (7)： RF ,  ICP ,  放電 ,  イオン ,  中性 ,  衝突過程 ,  数値解析