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J-GLOBAL ID：201802274464281864   Reference number：18A1905666

Novel Feature Vectors Considering Distances between Wires for Lithography Hotspot Detection

リソグラフィーホットスポット検出のためのワイヤ間距離を考慮した新しい特徴ベクトル【JST・京大機械翻訳】
Author (4)：
Kataoka Gaku

About Kataoka Gaku

, 
Inagi Masato

About Inagi Masato

, 
Nagayama Shinobu

About Nagayama Shinobu

, 
Wakabayashi Shin'ichi

About Wakabayashi Shin'ichi


Material：
IEEE Conference Proceedings  (IEEE Conf Proc)

About IEEE Conference Proceedings


Volume： 2018  Issue： DSD  Page： 85-90  Publication year： 2018 
JST Material Number： W2441A  Document type： Proceedings
Article type： 原著論文  Country of issue： United States (USA)  Language： ENGLISH (EN)
Abstract/Point：
Abstract/Point
Japanese summary of the article(about several hundred characters).
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In this paper, we propose some...
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Thesaurus term：
Thesaurus term/Semi thesaurus term
Keywords indexed to the article.
All keywords is available on JDreamIII(charged).
On J-GLOBAL, this item will be available after more than half a year after the record posted. In addtion, medical articles require to login to MyJ-GLOBAL.
photomask

About photomask

, 
image

About image

, 
Machine Learning

About Machine Learning

, 
*lithography

About lithography

, 
production process

About production process

, 
failure rate

About failure rate

, 
*hot spot

About hot spot

, 
LSI

About LSI

, 
*metal wire

About metal wire

, 
*feature vector

About feature vector

, 
mask

About mask


Semi thesaurus term：
Thesaurus term/Semi thesaurus term
Keywords indexed to the article.
All keywords is available on JDreamIII(charged).
On J-GLOBAL, this item will be available after more than half a year after the record posted. In addtion, medical articles require to login to MyJ-GLOBAL.
誤り確率

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, 【Automatic Indexing@JST】
JST classification (1)：
JST classification
Category name(code) classified by JST.
Graphic and image processing in general 
(JE04010I)

About Graphic and image processing in general

Terms in the title (2)：
Terms in the title
Keywords automatically extracted from the title.
ワイヤ

About ワイヤ

, 
特徴ベクトル

About 特徴ベクトル


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