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J-GLOBAL ID：201802285583722169   Reference number：18A2034594

Deep-hole drilling of amorphous silica glass by extreme ultraviolet femtosecond pulses

極端紫外線フェムト秒パルスによる非晶質シリカガラスの深穴穴あけ【JST・京大機械翻訳】

Author (14)： Shibuya Tatsunori (Research Institute for Measurement and Analytical Instrumentation (RIMA), National Metrology Institute of Japan (NMIJ), National Institute of Advanced Industrial Science and Technology (AIST), 1-1-1 Umezono, Tsukuba 305-8568, Japan) ,  Takahashi Takashi (Research Institute for Science and Engineering, Waseda University, 3-4-1 Okubo, Shinjuku, Tokyo 169-8555, Japan) ,  Sakaue Kazuyuki (Research Institute for Science and Engineering, Waseda University, 3-4-1 Okubo, Shinjuku, Tokyo 169-8555, Japan) ,  Dinh Thanh-Hung (Kansai Photon Science Institute, National Institutes for Quantum and Radiological Science and Technology (QST), 8-1-7 Umemidai, Kizugawa, Kyoto 619-02 15, Japan) ,  Hara Hiroyuki (Department of Electrical and Electronic Engineering, Faculty of Engineering and Center for Optical Research and Education (CORE), Utsunomiya University, 7-1-2 Yoto, Utsunomiya, Tochigi 321-8585, Japan) ,  Higashiguchi Takeshi (Department of Electrical and Electronic Engineering, Faculty of Engineering and Center for Optical Research and Education (CORE), Utsunomiya University, 7-1-2 Yoto, Utsunomiya, Tochigi 321-8585, Japan) ,  Ishino Masahiko (Kansai Photon Science Institute, National Institutes for Quantum and Radiological Science and Technology (QST), 8-1-7 Umemidai, Kizugawa, Kyoto 619-02 15, Japan) ,  Koshiba Yuya (Research Institute for Science and Engineering, Waseda University, 3-4-1 Okubo, Shinjuku, Tokyo 169-8555, Japan) ,  Nishikino Masaharu (Kansai Photon Science Institute, National Institutes for Quantum and Radiological Science and Technology (QST), 8-1-7 Umemidai, Kizugawa, Kyoto 619-02 15, Japan) ,  Ogawa Hiroshi (Research Institute for Measurement and Analytical Instrumentation (RIMA), National Metrology Institute of Japan (NMIJ), National Institute of Advanced Industrial Science and Technology (AIST), 1-1-1 Umezono, Tsukuba 305-8568, Japan) ,  Tanaka Masahito (Research Institute for Measurement and Analytical Instrumentation (RIMA), National Metrology Institute of Japan (NMIJ), National Institute of Advanced Industrial Science and Technology (AIST), 1-1-1 Umezono, Tsukuba 305-8568, Japan) ,  Washio Masakazu (Research Institute for Science and Engineering, Waseda University, 3-4-1 Okubo, Shinjuku, Tokyo 169-8555, Japan) ,  Kobayashi Yohei (AIST-UTokyo Advanced Operando-Measurement Technology Open Innovation Laboratory (OPERANDO-OIL), National Institute of Advanced Industrial Science and Technology (AIST), 5-1-5 Kashiwanoha, Kashiwa, Chiba 277-8589, Japan) ,  Kuroda Ryunosuke (Research Institute for Measurement and Analytical Instrumentation (RIMA), National Metrology Institute of Japan (NMIJ), National Institute of Advanced Industrial Science and Technology (AIST), 1-1-1 Umezono, Tsukuba 305-8568, Japan)
Material： Applied Physics Letters  (Appl Phys Lett)
Volume： 113  Issue： 17  Page： 171902-171902-4  Publication year： 2018 
JST Material Number： H0613A  ISSN： 0003-6951  CODEN： APPLAB  Document type： Article
Article type： 原著論文  Country of issue： United States (USA)  Language： ENGLISH (EN)

Abstract/Point： A free-electron laser (FEL) is...

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Thesaurus term： free electron laser ,  microcrack ,  crater ,  femtosecond laser ,  *drilling(cutting) ,  X-ray ,  silica glass ,  interaction ,  wavelength ,  robustness ,  *extreme ultraviolet ,  near infrared radiation
Semi thesaurus term： レーザフルエンス ,  *非晶質シリカ ,  *フェムト秒パルス , 【Automatic Indexing@JST】

JST classification (1)： Laser irradiation effects and damages  (BK16040S)

Terms in the title (6)： 極端紫外線 ,  フェムト秒パルス ,  非晶質シリカ ,  ガラス ,  深穴 ,  穴あけ