Art

J-GLOBAL ID：201802286346105336   Reference number：18A0780853

3D-shape Measurement of a Rough Surface under OPD Having Different Time Variation for Each Part by Using Wavelength Shift Interferometer

光路差が部位毎に異なる時間変動を持つ状況での波長シフト干渉計を用いる粗面の3次元形状計測

Author (1)： ADACHI MASAAKI (公立小松大学 生産システム科学部)
Material： 実験力学  (JSEM)
Volume： 18  Issue： 1  Page： 10-17(J-STAGE)  Publication year： 2018 
JST Material Number： L4590A  ISSN： 1346-4930  Document type： Article
Article type： 原著論文  Country of issue： Japan (JPN)  Language： JAPANESE (JA)

Thesaurus term： *shape measurement ,  speckle interferometry ,  rough surface ,  phase(topology) ,  distribution ,  image analysis
Semi thesaurus term： speckle interferometry ,  interferogram ,  *three-dimensional shape measurement ,  wavelength shift

Author keywords (10)： 3D shape measurement ,  rough surface ,  speckle interferometer ,  phase extraction ,  temperature rising ,  3D shape measurement ,  rough surface ,  speckle interferometer ,  phase extraction ,  temperature rising

JST classification (1)： Measuring methods and instruments of length,area,cross section,volume,angle  (AD05020O)

Reference (8)：

• 1) H. Schreiber, and J. H. Bruning,: Phase Shifting Interferometry, Optical Shop Testing, 3rd ed.,(D. Malacara ed.),Wiley, (2007), 547-655.
• 2) M.Adachi, T.Sabuta and Y.Niwa,: High-Precision 3D-Shape Measurement Using Interferograms Exposured Under Vertical Vibration (in Japanese), Journal of Japan Soc. for Precision Engineering, 78-12 (2012), 1076-1081.
• 3) M.Adachi, S.Sunada, Phase-shift extraction from twice-normalized light intensity changes recorded with random phase shifts, Optical Review, 21-5 (2014), 522-525.
• 4) J. E. Greivenkamp, Generalized data reduction for heterodyne interferometry, Optical Engineering, 23-4 (1984), 350-352.
• 5) G.Lai, T.Yatagai, Generalized phase-shifting interferometry, J. Opt. Soc. Am. A, 8-5 (1991), 822-827.

Terms in the title (7)： 光路差 ,  時間変動 ,  状況 ,  波長シフト ,  干渉計 ,  粗面 ,  3次元形状計測