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J-GLOBAL ID：201902200363989177   Reference number：19S0436060

Study on shape measurement of glass substrates for FPD

Author (5)： Ito, Y. (Department of Mechanical Systems Engineering, Tokyo University of Agriculture and Technology) ,  Natsu, W. (Department of Mechanical Systems Engineering, Tokyo University of Agriculture and Technology) ,  Kunieda, M. (Department of Mechanical Systems Engineering, Tokyo University of Agriculture and Technology) ,  Maruya, N. (Metrology Systems Division, Kuroda Precision Industries Ltd.) ,  Iguchi, N. (Metrology Systems Division, Kuroda Precision Industries Ltd.)
Material： EUSPEN 2005 - Proceedings of the 5th International Conference of the European Society for Precision Engineering and Nanotechnology
Page： 29-32  Publication year： 2005 
JST Material Number： SCOPUS 
Country of issue： United Kingdom (GBR)  Language： English (EN)

Terms in the title (1)： FPD