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J-GLOBAL ID：201902211113624809   Reference number：19S1722539

An interpolation error measuring system using a tuning fork stage

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Author (4)：
Makinouchi, S.

About Makinouchi, S.

(Nikon Corporation)

About Nikon Corporation

, 
Watanabe, A.

About Watanabe, A.

(Nikon Corporation)

About Nikon Corporation

, 
Takasaki, M.

About Takasaki, M.

(Nikon Corporation)

About Nikon Corporation

, 
Wakui, S.

About Wakui, S.

(Tokyo University of Agriculture and Technology)

About Tokyo University of Agriculture and Technology


Material：
Proceedings of the 11th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2011

About Proceedings of the 11th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2011


Volume： 1  Page： 62-65  Publication year： 2011 
JST Material Number： SCOPUS  ISBN： 9780955308291 
Country of issue： United Kingdom (GBR)  Language： English (EN)

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