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J-GLOBAL ID:201902215327015758   Reference number:19A0530984

Study on Polishing Characteristics of Pyramidal Structured Polishing Pad

ピラミッド構造研磨パッドの研磨特性に関する研究
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Volume: 13  Issue:Page: 237-245  Publication year: Mar. 05, 2019 
JST Material Number: L0997B  ISSN: 1881-7629  Document type: Article
Article type: 原著論文  Country of issue: Japan (JPN)  Language: ENGLISH (EN)
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Reference (26):
  • [1] T. Ito and K. Morishige, “Polishing process automation by industrial robots with polished surface quality judged based on imaging processing,” Int. J. Automation Technol., Vol.3, No.2, pp. 130-135, 2009.
  • [2] Y. Ueki, K. Morishige, T. Ishida, and Y. Takeuchi, “Automation of polishing process by industrial robots - polishing path generation in consideration of surface curvature -,” J. of the Japan Society for Precision Engineering, Vol.70, pp. 1522-1526, 2004.
  • [3] F. Nagata and K. Watanabe, “Feed rate control using fuzzy reasoning for a mold polishing robot,” J. Robot. Mechatron., Vol.18, No.1, pp. 76-82, 2006.
  • [4] K. Shibuya and S. Issiki, “Evaluation of metallic mold surfaces polished by an industrial robot with stick whetstones,” Int. J. Automation Technol., Vol.8, No.2, pp. 253-263, 2014.
  • [5] F. Nagata, K. Watanabe, S. Hashino, H. Tanaka, T. Matsuyama, and K. Hara, “Polishing robot using joystick controlled teaching,” J. Robot. Mechatron., Vol.13, No.5, pp. 517-525, 2001.
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