Art

J-GLOBAL ID：201902224637069612   Reference number：19A1305654

Fabrication and optical properties of regularly arranged GaN-based nanocolumns on Si substrate

Si基板上に規則配列したGaN系ナノカラムの作製と光学特性【JST・京大機械翻訳】

Author (6)： Sekiguchi Hiroto (Department of Electrical and Electronic Information Engineering, Toyohashi University of Technology, 1-1 Hibarigaoka, Tempaku-cho, Toyohashi, Aichi 441-8580, Japan) ,  Higashi Yukimasa (Department of Electrical and Electronic Information Engineering, Toyohashi University of Technology, 1-1 Hibarigaoka, Tempaku-cho, Toyohashi, Aichi 441-8580, Japan) ,  Yamane Keisuke (Department of Electrical and Electronic Information Engineering, Toyohashi University of Technology, 1-1 Hibarigaoka, Tempaku-cho, Toyohashi, Aichi 441-8580, Japan) ,  Wakahara Akihiro (Department of Electrical and Electronic Information Engineering, Toyohashi University of Technology, 1-1 Hibarigaoka, Tempaku-cho, Toyohashi, Aichi 441-8580, Japan) ,  Okada Hiroshi (Institute of Liberal Arts and Sciences, Toyohashi University of Technology, 1-1 Hibarigaoka, Tempaku-cho, Toyohashi, Aichi 441-8580, Japan) ,  Kishino Katsumi (Department of Engineering and Applied Sciences, Sophia University, 7-1 Kioi-cho, Chiyoda-ku, Tokyo 102-8554, Japan)
Material： Journal of Vacuum Science & Technology. B. Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena  (Journal of Vacuum Science & Technology. B. Nanotechnology & Microelectronics: Materials, Processing, Measurement, & Phenomena)
Volume： 37  Issue： 3  Page： 031207-031207-6  Publication year： 2019 
JST Material Number： E0974A  ISSN： 2166-2746  CODEN： JVTBD9  Document type： Article
Article type： 原著論文  Country of issue： United States (USA)  Language： ENGLISH (EN)

Abstract/Point： Nanocolumn light-emitting diod...

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Thesaurus term： low temperature ,  quantum well ,  cathodoluminescence ,  photoluminescence ,  *gallium nitride ,  *optical property ,  optical element ,  *silicon ,  light emitting diode ,  emission intensity ,  *Si wafer
Semi thesaurus term： 光ルミネセンススペクトル ,  高効率 ,  モノリシック集積化 ,  *ナノコラム , 【Automatic Indexing@JST】

JST classification (2)： Semiconductor thin films  (BK14040E) ,  Manufacturing technology of solid-state devices  (NC03030V)

Terms in the title (6)： Si基板 ,  規則配列 ,  GaN ,  ナノカラム ,  作製 ,  光学特性