Art

J-GLOBAL ID：201902233250906448   Reference number：19A0071133

Microstructured SiO_x thin films deposited from hexamethyldisilazane and hexamethyldisiloxane using atmospheric pressure thermal microplasma jet

大気圧熱マイクロプラズマジェットを用いたヘキサメチルジシラザンとヘキサメチルジシロキサンから堆積した微細構造SiO_x薄膜【JST・京大機械翻訳】

Author (5)： Saito Tomohiro (Department of Applied Chemistry, Chemical Engineering and Biochemical Engineering, Yamagata University, Jonan 4-3-16, Yonezawa, Japan.) ,  Mitsuya Rei (Department of Applied Chemistry, Chemical Engineering and Biochemical Engineering, Yamagata University, Jonan 4-3-16, Yonezawa, Japan.) ,  Ito Yuta (Department of Applied Chemistry, Chemical Engineering and Biochemical Engineering, Yamagata University, Jonan 4-3-16, Yonezawa, Japan.) ,  Higuchi Takeshi (Department of Applied Chemistry, Chemical Engineering and Biochemical Engineering, Yamagata University, Jonan 4-3-16, Yonezawa, Japan.) ,  Aita Tadahiro (Department of Applied Chemistry, Chemical Engineering and Biochemical Engineering, Yamagata University, Jonan 4-3-16, Yonezawa, Japan.)
Material： Thin Solid Films
Volume： 669  Page： 321-328  Publication year： 2019 
JST Material Number： B0899A  ISSN： 0040-6090  Document type： Article
Article type： 原著論文  Country of issue： Netherlands (NLD)  Language： ENGLISH (EN)

Abstract/Point： Mictrostructured silicon oxide...

Register(free) or Log In to access     To see more with JDream III (charged).   {{ this.onShowAbsJLink("http://jdream3.com/lp/jglobal/index.html?docNo=19A0071133&from=J-GLOBAL&jstjournalNo=B0899A") }}

Thesaurus term： *thin film ,  substrate(plate) ,  silicon oxide ,  glass ,  *micro structure ,  linearity ,  precursor(substance) ,  plasma exposure
Semi thesaurus term： 形成機構 ,  金属基板 ,  ミクロ構造 ,  *一酸化ケイ素 ,  *マイクロプラズマジェット , 【Automatic Indexing@JST】

Author keywords (4)： Atmospheric pressure microplasma ,  Silicon oxide ,  Thin film ,  Microstructure

JST classification (2)： Thin films of other inorganic compounds  (BK14060A) ,  Oxide thin films  (BK14050P)

Substance index (2)： Hexamethyldisiloxane ,  Hexamethyldisilazane

Terms in the title (7)： 大気圧 ,  マイクロプラズマジェット ,  ヘキサメチルジシラザン ,  ヘキサメチルジシロキサン ,  堆積 ,  微細構造 ,  薄膜