Art

J-GLOBAL ID：201902266551320529   Reference number：19A0999242

Raman spectroscopic studies of stress-induced structure alteration in diamond-like carbon films

ダイヤモンド状炭素膜における応力誘起構造変化のRaman分光研究【JST・京大機械翻訳】

Author (8)： Zhu Wenliang (Ceramic Physics Laboratory, Kyoto Institute of Technology, Sakyo-ku, Matsugasaki, 606-8585 Kyoto, Japan) ,  Arao Kazuyuki (Ceramic Physics Laboratory, Kyoto Institute of Technology, Sakyo-ku, Matsugasaki, 606-8585 Kyoto, Japan) ,  Nakamura Morimasa (Kyoto Institute of Technology, Sakyo-ku, Matsugasaki, 606-8585 Kyoto, Japan) ,  Takagawa Yuka (Graduate School of Kyoto Institute of Technology, Sakyo-ku, Matsugasaki, 606-8585 Kyoto, Japan) ,  Miura Ken-ichi (Osaka Research Institute of Industrial Science and Technology, 2-7-1, Ayumino, Izumi-shi, 594-1157 Osaka, Japan) ,  Kobata Junpei (Osaka Research Institute of Industrial Science and Technology, 2-7-1, Ayumino, Izumi-shi, 594-1157 Osaka, Japan) ,  Marin Elia (Ceramic Physics Laboratory, Kyoto Institute of Technology, Sakyo-ku, Matsugasaki, 606-8585 Kyoto, Japan) ,  Pezzotti Giuseppe (Ceramic Physics Laboratory, Kyoto Institute of Technology, Sakyo-ku, Matsugasaki, 606-8585 Kyoto, Japan)
Material： Diamond and Related Materials  (Diam Relat Mater)
Volume： 94  Page： 1-7  Publication year： 2019 
JST Material Number： W0498A  ISSN： 0925-9635  Document type： Article
Article type： 原著論文  Country of issue： Netherlands (NLD)  Language： ENGLISH (EN)

Abstract/Point： In this paper, Raman spectral ...

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Thesaurus term： stress analysis ,  spectrum ,  voltage ,  scanning ,  substrate(plate) ,  Raman spectrum ,  *Raman spectroscopy ,  DLC film ,  compressive stress ,  *diamond-like carbon ,  stress field
Semi thesaurus term： Vickers硬さ ,  無秩序性 ,  *構造変化 , 【Automatic Indexing@JST】

Author keywords (6)： Diamond-like carbon ,  Thin films ,  Residual stress ,  Structure alteration ,  Vickers indentation ,  Raman spectroscopy

JST classification (2)： Carbon and its compounds  (YB02060D) ,  Thin films of other inorganic compounds  (BK14060A)

Terms in the title (6)： ダイヤモンド状炭素 ,  応力 ,  誘起 ,  構造変化 ,  Raman分光 ,  研究