Art

J-GLOBAL ID：201902268697136541   Reference number：19A1696448

Validation of correction method for gap shape measurement by vertical-objective-type ellipsometric microscopy with rotating-compensator ellipsometry

回転補償器偏光解析を用いた垂直対物型偏光解析顕微鏡法によるギャップ形状測定の補正法の検証

Author (5)： NAMBA Katsuya (Department of Micro-Nano Mechanical Science and Engineering, Nagoya University) ,  SASAO Yusuke (Department of Micro-Nano Mechanical Science and Engineering, Nagoya University) ,  FUKUZAWA Kenji (Department of Micro-Nano Mechanical Science and Engineering, Nagoya University) ,  ITOH Shintaro (Department of Micro-Nano Mechanical Science and Engineering, Nagoya University) ,  ZHANG Hedong (Department of Complex Systems Science, Nagoya University)
Material： Journal of Advanced Mechanical Design, Systems, and Manufacturing (Web)  (J Adv Mech Des Syst Manuf (Web))
Volume： 13  Issue： 2  Page： JAMDSM0025(J-STAGE)  Publication year： 2019 
JST Material Number： U0027A  ISSN： 1881-3054  Document type： Article
Article type： 原著論文  Country of issue： Japan (JPN)  Language： ENGLISH (EN)

Thesaurus term： rotation ,  compensator(electric) ,  *ellipsometry ,  vertical ,  air gap ,  *shape measurement ,  *correction(compensation) ,  accuracy ,  transverse direction ,  resolving power ,  optical microscope ,  polarized light ,  angle of incidence ,  contact ,  range
Semi thesaurus term： *air-gap ,  *ellipsometry ,  compensator ,  *correction method ,  region

Author keywords (5)： Nanometer gap ,  Film thickness measurement ,  Ellipsometry ,  Tribology ,  Contact mechanics

JST classification (2)： Measuring methods and instruments of length,area,cross section,volume,angle  (AD05020O) ,  Polarimetry and polarimeters  (BD07050K)

Reference (24)：

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• Antunes, J. M., Menezes, L. F. and Fernandes, J. V., Three-dimensional numerical simulation of Vickers indentation test, Solids and Structures, Vol.43, No.3-4 (2006), pp.784-806.
• Beaglehole, D., Performance of a microscopic imaging ellipsometer, Review of scientific instruments, Vol.59, No.12 (1988), pp.2557-2559.
• Dowson, D., Developments in lubrication-the thinning film, Journal of Physics D, Vol.25 (1992), pp.A334-A339.
• Fujiwara, H., Spectroscopic ellipsometry: principles and applications, New York:Wiley (2007).

Terms in the title (8)： 補償器 ,  偏光解析 ,  垂直 ,  顕微鏡法 ,  ギャップ ,  形状測定 ,  補正法 ,  検証