Electrical and patterning properties of direct nanoimprinted indium oxide (In<sub>2</sub>O<sub>3</sub>) and indium tin oxide (ITO)

JAIN Puneet; SU Chang; HAGA Ken-ichi; TOKUMITSU Eisuke

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J-GLOBAL ID：201902269541862291 Reference number：19A1798802

Electrical and patterning properties of direct nanoimprinted indium oxide (In₂O₃) and indium tin oxide (ITO)

直接ナノインプリントされた酸化インジウム(In₂O₃)および酸化インジウムすず(ITO)の電気的およびパターン形成特性

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Volume： 58 Issue： SD Page： SDDJ05.1-SDDJ05.8 Publication year： Jun. 2019
JST Material Number： G0520B ISSN： 0021-4922 CODEN： JJAPB6 Document type： Article
Article type：原著論文 Country of issue： United Kingdom (GBR) Language： ENGLISH (EN)

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Manufacturing technology of solid-state devices

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Electrical and patterning properties of direct nanoimprinted indium oxide (In2O3) and indium tin oxide (ITO)

Electrical and patterning properties of direct nanoimprinted indium oxide (In₂O₃) and indium tin oxide (ITO)