Art
J-GLOBAL ID：201902272223114839   Reference number：19A2607556

The effect of substrate roughness on the properties of RF sputtered AZO thin film

RFスパッタしたアゾ薄膜の特性に及ぼす基板粗さの影響【JST・京大機械翻訳】
Author (4)：
Hamada Kairi

About Hamada Kairi

(Graduate School of Energy Science, Kyoto University, Yoshidahonmachi, Sakyo-ku, Kyoto 6068501, Japan)

About Graduate School of Energy Science, Kyoto University, Yoshidahonmachi, Sakyo-ku, Kyoto 6068501, Japan

, 
Ogawa Takaya

About Ogawa Takaya

(Graduate School of Energy Science, Kyoto University, Yoshidahonmachi, Sakyo-ku, Kyoto 6068501, Japan)

About Graduate School of Energy Science, Kyoto University, Yoshidahonmachi, Sakyo-ku, Kyoto 6068501, Japan

, 
Okumura Hideyuki

About Okumura Hideyuki

(Graduate School of Energy Science, Kyoto University, Yoshidahonmachi, Sakyo-ku, Kyoto 6068501, Japan)

About Graduate School of Energy Science, Kyoto University, Yoshidahonmachi, Sakyo-ku, Kyoto 6068501, Japan

, 
Ishihara Keiichi N.

About Ishihara Keiichi N.

(Graduate School of Energy Science, Kyoto University, Yoshidahonmachi, Sakyo-ku, Kyoto 6068501, Japan)

About Graduate School of Energy Science, Kyoto University, Yoshidahonmachi, Sakyo-ku, Kyoto 6068501, Japan


Material：
MRS Communications

About MRS Communications


Volume： 9  Issue： 2  Page： 697-701  Publication year： 2019 
JST Material Number： W5490A  ISSN： 2159-6859  Document type： Article
Article type： 短報  Country of issue： United Kingdom (GBR)  Language： ENGLISH (EN)
Abstract/Point：
Abstract/Point
Japanese summary of the article(about several hundred characters).
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Aluminum-doped zinc oxide (AZO...
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Thesaurus term：
Thesaurus term/Semi thesaurus term
Keywords indexed to the article.
All keywords is available on JDreamIII(charged).
On J-GLOBAL, this item will be available after more than half a year after the record posted. In addtion, medical articles require to login to MyJ-GLOBAL.
zinc oxide

About zinc oxide

, 
*thin film

About thin film

, 
aluminum

About aluminum

, 
optical gap

About optical gap

, 
rough surface

About rough surface

, 
*RF sputtering

About RF sputtering

, 
solar cell

About solar cell

, 
*substrate(plate)

About substrate(plate)

, 
transparency

About transparency

, 
blue shift

About blue shift

, 
*surface roughness

About surface roughness


Semi thesaurus term：
Thesaurus term/Semi thesaurus term
Keywords indexed to the article.
All keywords is available on JDreamIII(charged).
On J-GLOBAL, this item will be available after more than half a year after the record posted. In addtion, medical articles require to login to MyJ-GLOBAL.
ポストアニーリング

About ポストアニーリング

, 
伝導率

About 伝導率

, 
ヘイズ

About ヘイズ

, 
基板表面

About 基板表面

, 
透明導電性酸化物

About 透明導電性酸化物

, 【Automatic Indexing@JST】
JST classification (2)：
JST classification
Category name(code) classified by JST.
Solar cell 
(NC03084O)

About Solar cell

,  Oxide thin films 
(BK14050P)

About Oxide thin films

Terms in the title (3)：
Terms in the title
Keywords automatically extracted from the title.
RFスパッタ

About RFスパッタ

, 
薄膜

About 薄膜

, 
粗さ

About 粗さ


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