Art

J-GLOBAL ID：201902279620595526   Reference number：19A0235566

High-resolution depth profiling of soda-lime silicate glass using high-resolution RBS and ERDA

高分解能RBSとERDAを用いたソーダ石灰ケイ酸塩ガラスの高分解能深さプロファイリング【JST・京大機械翻訳】

Author (5)： Sakata Hiroki (Department of Micro Engineering, Kyoto University, Kyoto 615-8540, Japan) ,  Yamamoto Yuichi (Innovative Technology Research Center, ASAHI Glass Co., Ltd., Hazawa-cho, Kanagawa-ku, Yokohama 221-8755, Japan) ,  Sato Koya (Department of Micro Engineering, Kyoto University, Kyoto 615-8540, Japan) ,  Nakajima Kaoru (Department of Micro Engineering, Kyoto University, Kyoto 615-8540, Japan) ,  Kimura Kenji (Department of Micro Engineering, Kyoto University, Kyoto 615-8540, Japan)
Material： Nuclear Instruments & Methods in Physics Research. Section B. Beam Interactions with Materials and Atoms  (Nuclear Instruments and Methods in Physics Research. Section B. Beam Interactions with Materials and Atoms)
Volume： 440  Page： 60-63  Publication year： 2019 
JST Material Number： H0899A  ISSN： 0168-583X  Document type： Article
Article type： 原著論文  Country of issue： Netherlands (NLD)  Language： ENGLISH (EN)

Abstract/Point： Composition depth profiles of ...

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Thesaurus term： *sodium carbonate ,  *high-resolution ,  cation ,  *lime ,  *glass ,  *depth profile ,  *silicate glass ,  radiation damage ,  fluence ,  hydrogen ,  Rutherford scattering spectroscopy ,  silica glass
Semi thesaurus term： ERD分析 , 【Automatic Indexing@JST】

Author keywords (4)： High-resolution RBS ,  High-resolution ERDA ,  Soda-lime silicate glass ,  Depth profiling

JST classification (2)： Irradiational changes of other materials  (BK16124V) ,  Properties,analysis and test of glass  (YC02030Z)

Terms in the title (5)： 高分解能 ,  ソーダ ,  石灰 ,  ケイ酸塩ガラス ,  深さプロファイリング