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J-GLOBAL ID：201902280672572576   Reference number：19A2750758

Comparison of measured and simulated chemical species densities in vacuum ultraviolet photolysis method of Ar/H₂O/O₂ mixture developed for selectively supplying reactive species

反応性種を選択的に供給するために開発したAr/H_2O/O_2混合物の真空紫外光分解法における測定および模擬化学種密度の比較【JST・京大機械翻訳】

Author (4)： Ono Ryo (Department of Advanced Energy, The University of Tokyo, 5-1-5 Kashiwanoha, Kashiwa, Chiba 227-8568, Japan) ,  Iwase Atsuro (Department of Advanced Energy, The University of Tokyo, 5-1-5 Kashiwanoha, Kashiwa, Chiba 227-8568, Japan) ,  Murakami Shinichiro (Department of Advanced Energy, The University of Tokyo, 5-1-5 Kashiwanoha, Kashiwa, Chiba 227-8568, Japan) ,  Zen Shungo (Department of Electrical and Electronic Engineering, Tokyo Institute of Technology, 2-12-1 Ookayama, Meguro-ku, Tokyo 152-8552, Japan)
Material： Journal of Photochemistry and Photobiology. A. Chemistry  (J Photochem Photobiol A Chem)
Volume： 387  Page： Null  Publication year： 2020 
JST Material Number： D0721B  ISSN： 1010-6030  Document type： Article
Article type： 原著論文  Country of issue： Netherlands (NLD)  Language： ENGLISH (EN)

Abstract/Point： Reactive species play importan...

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Thesaurus term： plasma ,  *reactivity ,  *photolysis/photodisintegration ,  surface treatment ,  *chemical species ,  simulation ,  quartz tube

Author keywords (5)： Vacuum ultraviolet photolysis ,  Xe₂ excimer lamp ,  Reactive species ,  Density measurement ,  Simulation

JST classification (1)： Photochemical reactions  (CB08020F)

Terms in the title (5)： 反応性 ,  開発 ,  Ar ,  混合物 ,  化学