Art
J-GLOBAL ID:201902284221021680   Reference number:19A1997961

Review of Helicon High-Density Plasma: Production Mechanism and Plasma/Wave Characteristics

ヘリコン高密度プラズマのレビュー 生成機構とプラズマ/波動特性
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Material:
Volume: 13  Page: 1101014(J-STAGE)  Publication year: 2018 
JST Material Number: U0045A  ISSN: 1880-6821  Document type: Article
Article type: 解説  Country of issue: Japan (JPN)  Language: ENGLISH (EN)
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All keywords is available on JDreamIII(charged).
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JST classification
Category name(code) classified by JST.
Plasma devices  ,  Applications of plasma  ,  Manufacturing technology of solid-state devices  ,  Electromagnetic waves in plasma  ,  Plasma production and heating 
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