Art

J-GLOBAL ID：201902291256416912   Reference number：19A2210197

Hard titanium nitride coating deposition inside narrow tubes using pulsed DC PECVD processes

パルスDC PECVDプロセスを用いた狭い管内の硬質窒化チタン被覆堆積【JST・京大機械翻訳】

Author (6)： Kilicaslan A. (Department of Engineering Physics, Polytechnique Montreal, Montreal, QC H3C-3A7, Canada) ,  Zabeida O. (Department of Engineering Physics, Polytechnique Montreal, Montreal, QC H3C-3A7, Canada) ,  Bousser E. (Department of Engineering Physics, Polytechnique Montreal, Montreal, QC H3C-3A7, Canada) ,  Schmitt T. (Department of Engineering Physics, Polytechnique Montreal, Montreal, QC H3C-3A7, Canada) ,  Klemberg-Sapieha J.E. (Department of Engineering Physics, Polytechnique Montreal, Montreal, QC H3C-3A7, Canada) ,  Martinu L. (Department of Engineering Physics, Polytechnique Montreal, Montreal, QC H3C-3A7, Canada)
Material： Surface & Coatings Technology  (Surf Coat Technol)
Volume： 377  Page： Null  Publication year： 2019 
JST Material Number： D0205C  ISSN： 0257-8972  Document type： Article
Article type： 原著論文  Country of issue： Netherlands (NLD)  Language： ENGLISH (EN)

Abstract/Point： In the present work, we review...

Register(free) or Log In to access     To see more with JDream III (charged).   {{ this.onShowAbsJLink("http://jdream3.com/lp/jglobal/index.html?docNo=19A2210197&from=J-GLOBAL&jstjournalNo=D0205C") }}

Thesaurus term： *covering ,  micro structure ,  substrate(plate) ,  electric discharge ,  *plasma CVD ,  *hard ,  *pulse ,  densification ,  hardness ,  X-ray diffraction ,  *nitriding ,  nanoindentation ,  plasma
Semi thesaurus term： エロージョン ,  *窒化チタン , 【Automatic Indexing@JST】

Author keywords (5)： P-DC PECVD ,  NLOS ,  TiN coating ,  Hollow cathode ,  Inner surface

JST classification (2)： Carbon and its compounds  (YB02060D) ,  Mechanical properties  (WB02030U)

Terms in the title (7)： パルス ,  DC ,  PECVD ,  プロセス ,  硬質 ,  窒化チタン ,  堆積