Art

J-GLOBAL ID：202002210774049299   Reference number：20A0495684

Effect of Active Layer Thickness on Device Performance and Hot Carrier Instability in Metal Induced Crystallized Polycrystalline Silicon Thin-Film Transistors

金属誘起結晶化多結晶シリコン薄膜トランジスタにおけるデバイス性能とホットキャリア不安定性に及ぼす活性層厚さの影響【JST・京大機械翻訳】

Author (10)： Jiang Zhendong (Shenzhen University,Institute of Microscale Optoelectronics (IMO),Shenzhen,China,518060) ,  Kwok Hoi-Sing (The Hong Kong University of Science and Technology,State Key Laboratory of Advanced Displays and Optoelectronics Technologies,Kowloon,Hong Kong,Clear Water Bay) ,  Zhang Meng (Shenzhen University,Institute of Microscale Optoelectronics (IMO),Shenzhen,China,518060) ,  Ma Xiaotong (Shenzhen University,Institute of Microscale Optoelectronics (IMO),Shenzhen,China,518060) ,  Yan Yan (Shenzhen University,Institute of Microscale Optoelectronics (IMO),Shenzhen,China,518060) ,  Li Guijun (Shenzhen University,Institute of Microscale Optoelectronics (IMO),Shenzhen,China,518060) ,  Deng Sunbin (The Hong Kong University of Science and Technology,State Key Laboratory of Advanced Displays and Optoelectronics Technologies,Kowloon,Hong Kong,Clear Water Bay) ,  Zhou Wei (The Hong Kong University of Science and Technology,State Key Laboratory of Advanced Displays and Optoelectronics Technologies,Kowloon,Hong Kong,Clear Water Bay) ,  Chen Rongsheng (The Hong Kong University of Science and Technology,State Key Laboratory of Advanced Displays and Optoelectronics Technologies,Kowloon,Hong Kong,Clear Water Bay) ,  Wong Man (The Hong Kong University of Science and Technology,State Key Laboratory of Advanced Displays and Optoelectronics Technologies,Kowloon,Hong Kong,Clear Water Bay)
Material： IEEE Conference Proceedings  (IEEE Conf Proc)
Volume： 2019  Issue： IPFA  Page： 1-4  Publication year： 2019 
JST Material Number： W2441A  Document type： Proceedings
Article type： 原著論文  Country of issue： United States (USA)  Language： ENGLISH (EN)

Abstract/Point： In this paper, the effect of a...

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Thesaurus term： *hot carrier ,  *polysilicon ,  instability ,  *active layer ,  *thin film transistor ,  channel
Semi thesaurus term： 電界分布 ,  ゲート酸化膜 ,  ゲート制御 ,  *金属誘起結晶化 , 【Automatic Indexing@JST】

JST classification (2)： Graphic and image processing in general  (JE04010I) ,  Antennas  (ND06000M)

Terms in the title (7)： 金属誘起結晶化 ,  多結晶シリコン ,  薄膜トランジスタ ,  ホットキャリア ,  不安定性 ,  活性層 ,  厚さ