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J-GLOBAL ID：202002214751471166   Reference number：20A2687123

Ablation threshold and crater morphology of amorphous and crystalline SiO₂ glass for extreme ultraviolet femtosecond pulses

極端紫外フェムト秒パルス用の非晶質および結晶性SiO₂ガラスのアブレーション閾値とクレータ形態

Author (24)： Shibuya T. (Research Institute for Measurement and Analytical Instrumentation (RIMA), National Metrology Institute of Japan (NMIJ), National Institute of Advanced Industrial Science and Technology (AIST), 1-1-1 Umezono, Tsukuba 305-8568, Japan) ,  Sakaue K. (Photon Science Center, Graduate School of Engineering, The University of Tokyo, 7-3-1 Hongo, Bunkyo, Tokyo 113-8656, Japan) ,  Ogawa H. (Research Institute for Measurement and Analytical Instrumentation (RIMA), National Metrology Institute of Japan (NMIJ), National Institute of Advanced Industrial Science and Technology (AIST), 1-1-1 Umezono, Tsukuba 305-8568, Japan) ,  Ogawa H. (AIST-UTokyo Advanced Operando-Measurement Technology Open Innovation Laboratory (OPERANDO-OIL), National Institute of Advanced Industrial Science and Technology (AIST), 5-1-5 Kashiwanoha, Kashiwa, Chiba 277-8561, Japan) ,  Dinh T.-H. (Kansai Photon Science Institute, National Institutes for Quantum and Radiological Science and Technology (QST), 8-1-7 Umemidai, Kizugawa, Kyoto 619-0215, Japan) ,  Satoh D. (Research Institute for Measurement and Analytical Instrumentation (RIMA), National Metrology Institute of Japan (NMIJ), National Institute of Advanced Industrial Science and Technology (AIST), 1-1-1 Umezono, Tsukuba 305-8568, Japan) ,  Satoh D. (AIST-UTokyo Advanced Operando-Measurement Technology Open Innovation Laboratory (OPERANDO-OIL), National Institute of Advanced Industrial Science and Technology (AIST), 5-1-5 Kashiwanoha, Kashiwa, Chiba 277-8561, Japan) ,  Terasawa E. (AIST-UTokyo Advanced Operando-Measurement Technology Open Innovation Laboratory (OPERANDO-OIL), National Institute of Advanced Industrial Science and Technology (AIST), 5-1-5 Kashiwanoha, Kashiwa, Chiba 277-8561, Japan) ,  Terasawa E. (Research Institute for Science and Engineering, Waseda University, 3-4-1 Okubo, Shinjuku, Tokyo 169-8555, Japan) ,  Washio M. (Research Institute for Science and Engineering, Waseda University, 3-4-1 Okubo, Shinjuku, Tokyo 169-8555, Japan) ,  Tanaka M. (Research Institute for Measurement and Analytical Instrumentation (RIMA), National Metrology Institute of Japan (NMIJ), National Institute of Advanced Industrial Science and Technology (AIST), 1-1-1 Umezono, Tsukuba 305-8568, Japan) ,  Tanaka M. (AIST-UTokyo Advanced Operando-Measurement Technology Open Innovation Laboratory (OPERANDO-OIL), National Institute of Advanced Industrial Science and Technology (AIST), 5-1-5 Kashiwanoha, Kashiwa, Chiba 277-8561, Japan) ,  Higashiguchi T. (Department of Electrical and Electronic Engineering, Faculty of Engineering and Center for Optical Research and Education (CORE), Utsunomiya University, 7-1-2 Yoto, Utsunomiya, Tochigi 321-8585, Japan) ,  Ishino M. (Kansai Photon Science Institute, National Institutes for Quantum and Radiological Science and Technology (QST), 8-1-7 Umemidai, Kizugawa, Kyoto 619-0215, Japan) ,  Kubota Y. (Japan Synchrotron Radiation Research Institute, 1-1-1, Kouto, Sayo-cho, Sayo-gun, Hyogo 679-5198, Japan) ,  Kubota Y. (RIKEN SPring-8 Center, 1-1-1, Kouto, Sayo-cho, Sayo-gun, Hyogo 679-5148, Japan) ,  Inubushi Y. (Japan Synchrotron Radiation Research Institute, 1-1-1, Kouto, Sayo-cho, Sayo-gun, Hyogo 679-5198, Japan) ,  Inubushi Y. (RIKEN SPring-8 Center, 1-1-1, Kouto, Sayo-cho, Sayo-gun, Hyogo 679-5148, Japan) ,  Owada S. (Japan Synchrotron Radiation Research Institute, 1-1-1, Kouto, Sayo-cho, Sayo-gun, Hyogo 679-5198, Japan) ,  Owada S. (RIKEN SPring-8 Center, 1-1-1, Kouto, Sayo-cho, Sayo-gun, Hyogo 679-5148, Japan) ,  Nishikino M. (Kansai Photon Science Institute, National Institutes for Quantum and Radiological Science and Technology (QST), 8-1-7 Umemidai, Kizugawa, Kyoto 619-0215, Japan) ,  Kobayashi Y. (The Institute for Solid State Physics, The University of Tokyo, 5-1-5 Kashiwanoha, Kashiwa, Chiba 277-8561, Japan) ,  Kuroda R. (Research Institute for Measurement and Analytical Instrumentation (RIMA), National Metrology Institute of Japan (NMIJ), National Institute of Advanced Industrial Science and Technology (AIST), 1-1-1 Umezono, Tsukuba 305-8568, Japan) ,  Kuroda R. (AIST-UTokyo Advanced Operando-Measurement Technology Open Innovation Laboratory (OPERANDO-OIL), National Institute of Advanced Industrial Science and Technology (AIST), 5-1-5 Kashiwanoha, Kashiwa, Chiba 277-8561, Japan)
Material： Japanese Journal of Applied Physics  (JJAP)
Volume： 59  Issue： 12  Page： 122004 (3pp)  Publication year： Dec. 2020 
JST Material Number： G0520B  ISSN： 0021-4922  CODEN： JJAPB6  Document type： Article
Article type： 原著論文  Country of issue： United Kingdom (GBR)  Language： ENGLISH (EN)

Thesaurus term： *extreme ultraviolet ,  *pulse ,  amorphous state ,  crystallinity ,  silicon dioxide ,  *ablation ,  crater ,  fluence ,  *silica glass ,  *femtosecond pulse
Semi thesaurus term： extreme-ultraviolet ,  crystallinity

JST classification (1)： Laser irradiation effects and damages  (BK16040S)

Terms in the title (8)： 極端紫外 ,  フェムト秒パルス ,  非晶質 ,  ガラス ,  アブレーション ,  閾値 ,  クレータ ,  形態