Art
J-GLOBAL ID:202002223687673355
Reference number:20A1262159
Dependence of sputtering yield on the surface structure of tungsten irradiated by argon
表面構造によるタングステンのスパッタリング収量の変化
Author (6):
,
,
,
,
,
Material:
Volume:
33rd
Page:
ROMBUNNO.29aP73 (WEB ONLY)
Publication year:
2016
JST Material Number:
U1621A
Document type:
Proceedings
Country of issue:
Japan (JPN)
Language:
JAPANESE (JA)
Terms in the title (4):
Terms in the title
Keywords automatically extracted from the title.
,
,
,
Return to Previous Page