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J-GLOBAL ID:202002225808973487   Reference number:20A1236073

Roles of strain and carrier in silicon oxidation

シリコン酸化におけるひずみとキャリアの役割
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Volume: 59  Issue: SM  Page: SM0801 (42pp)  Publication year: Jul. 2020 
JST Material Number: G0520B  ISSN: 0021-4922  CODEN: JJAPB6  Document type: Article
Article type: 文献レビュー  Country of issue: United Kingdom (GBR)  Language: ENGLISH (EN)
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Electronic structure of surfaces 
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