Research field (4)：
Crystal engineering
, Applied materials
, Electric/electronic material engineering
, Thin-film surfaces and interfaces
Research keywords (8)：
synchrotron radiation
, surface physics
, control of surface reaction
, silicon oxide film
, diamond thin film
, semiconductor process
, real-time monitoring
, surface dynamics
Research theme for competitive and other funds (17)：
2000 - 現在 Crystal growth of diamond epitanial thin films
1987 - 現在 In situ observation of crystal structure on Si surface at high temperature
1982 - 現在 Surface reaction kinetics of chemical reactions on Si : crystal growth, etching and oxidation
2019 - 2023 非熱平衡状態における表面反応速度論:表面計測法を用いた歪みと速度の同時観察
2016 - 2018 Development of ion-assisted surface diffusion polishing method to flatten diamond surfaces in atomic level
2015 - 2018 Development of component technology for scanning microinjection microscope
2013 - 2016 Excitation by incident electron wave field of RHEED - Auger electron and surface plasmon -
2012 - 2014 Surface treatment process using photoemission-assisted plasma for achievement of atomic scale flattened surface
2004 - 2005 Study of the thermal oxidation reaction dynamics on strain-controlled Si surfaces
2000 - 2001 In-situ observation of thermal oxidation on the Si surface by RHEED-AES CL
1998 - 2000 Establishment of Structural Analysis Method of High Resolution X-ray Photoelectron Diffraction for Hetero-epitaxial Growth Surface and Interface Systems
1995 - 1996 Development of a Local-Surface-Analysis Apparatus with Micro-Electron Beam and Retarding Two-Dimensional Display Type Electron Analyzer
1991 - 1993 Low-Temperature Deposition of Dielectric Films Using Synchrotron Radiation-Assisted Gas-Source CVD
1988 - 1990 Chemical Vapor Deposition of Epitaxial Thin Films by Synchrotron-Radiation-Assisted Surface Reaction
Yasutaka Tsuda, Akitaka Yoshigoe, Shuichi Ogawa, Tetsuya Sakamoto, Yoshiki Yamamoto, Yukio Yamamoto, Yuji Takakuwa. Roles of excess minority carrier recombination and chemisorbed O2 species at SiO2/Si interfaces in Si dry oxidation: Comparison between p-Si(001) and n-Si(001) surfaces. The Journal of Chemical Physics. 2022. 157. 23. 234705/1-21
Yasutaka Tsuda, Akitaka Yoshigoe, Shuichi Ogawa, Tetsuya Sakamoto, Yuji Takakuwa. Observation of Chemisorbed O<sub>2</sub> Molecule at SiO<sub>2</sub>/Si(001) Interface During Si Dry Oxidation. e-Journal of Surface Science and Nanotechnology. 2022. 21. 1. 30-39
Tomoaki Masuzawa, Yuki Okigawa, Shuichi Ogawa, Yuji Takakuwa, Kazuto Hatakeyama, Takatoshi Yamada. Synthesis and characterization of potassium-doped multilayer graphene prepared by wet process using potassium hydroxide. Nano Express. 2021. 2. 3. 030004-030004
Shuichi Ogawa, Ryo Taga, Akitaka Yoshigoe, Yuji Takakuwa. Two-step model for reduction reaction of ultrathin nickel oxide by hydrogen. Journal of Vacuum Science & Technology A. 2021. 39. 4. 043207-043207
Shuichi OGAWA, Bingruo ZHANG, Akitaka YOSHIGOE, Yuji TAKAKUWA. Oxidation Reaction Kinetics on Transition Metal Surfaces Observed by Real-time Photoelectron Spectroscopy. Vacuum and Surface Science. 2021. 64. 5. 218-223
津田泰孝, 小川修一, 吉越章隆, 坂本徹哉, 高桑雄二. Effect of O2 and SR ON-OFF on band bending at SiO2/Si(001) interfaces. 応用物理学会秋季学術講演会講演予稿集(CD-ROM). 2021. 82nd
吉越章隆, 津田泰孝, 冨永亜希, 坂本徹哉, 小川修一, 高桑雄二. Oxygen kinetic energy dependence of the satellite peak observed in O1s photoelectron spectra for Si(001)2×1 surface oxidation at room temperature. 応用物理学会秋季学術講演会講演予稿集(CD-ROM). 2021. 82nd
竹内走一郎, 古賀峻丞, 田中晶貴, ZEXU S., 津田泰孝, 小川修一, 高桑雄二, 室隆桂之, 橋本由介, 吉越章隆, et al. Initial oxidation structure analysis of Si(111)-7×7 surface using photoelectron holography. 日本物理学会講演概要集(CD-ROM). 2021. 76. 2
Flattening of Cu Surfaces with 26-eV Xe<sup>+</sup> ion from Rq = 2.9 to 1.3 nm
(14th International Conference on Atomically Controlled Surfaces, Interfaces and Nanostructures 2018)
Synthesis of Nitrogen-doped Graphite by Photoemission-assisted PECVD
(14th International Conference on Atomically Controlled Surfaces, Interfaces and Nanostructures 2018)
Interaction of DC Discharge Ar Plasma with Photoelectrons from UV-irradiated Au surface
(14th International Conference on Atomically Controlled Surfaces, Interfaces and Nanostructures 2018)
Band Alignment of Bulk h-BN/Graphene Measured by PEEM
(14th International Conference on Atomically Controlled Surfaces, Interfaces and Nanostructures 2018)
Behavior of Ni Vacancy during Oxidation on Ni(111) Surfaces
(14th International Conference on Atomically Controlled Surfaces, Interfaces and Nanostructures 2018)
