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J-GLOBAL ID:202002226855299680   Reference number:20A1566140

Evaluation of Back-Side Slits with Sub-millimeter Resolution Using a Differential AMR Probe

差動AMRプローブを用いたサブミリメートル分解能を有する裏面スリットの評価【JST・京大機械翻訳】
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Material:
Volume: 666  Page: 319-328  Publication year: 2020 
JST Material Number: W5070A  ISSN: 1876-1100  Document type: Proceedings
Article type: 原著論文  Country of issue: Germany, Federal Republic of (DEU)  Language: ENGLISH (EN)
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Abstract: The electromagnetic ...
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Nondestructive testing 
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