Art

J-GLOBAL ID：202002228307982538   Reference number：20A2362806

Reaction science of layer-by-layer thinning of graphene with oxygen neutrals at room temperature

室温における酸素中性粒子によるグラフェンのlayer-by-layer薄化の反応科学【JST・京大機械翻訳】

Author (8)： Sugiura Hirotsugu (Graduate School of Engineering, Nagoya University, Furo-cho, Chikusa-ku, 464-8603, Nagoya, Japan) ,  Kondo Hiroki (Center for Low-temperature Plasma Sciences, Nagoya University, Furo-cho, Chikusa-ku, 464-8601, Nagoya, Japan) ,  Higuchi Kimitaka (Institute of Materials and Systems for Sustainability (IMaSS), Nagoya University, Furo-cho, Chikusa-ku, 464-8603, Nagoya, Japan) ,  Arai Shigeo (Institute of Materials and Systems for Sustainability (IMaSS), Nagoya University, Furo-cho, Chikusa-ku, 464-8603, Nagoya, Japan) ,  Hamaji Ryo (Graduate School of Engineering, Nagoya University, Furo-cho, Chikusa-ku, 464-8603, Nagoya, Japan) ,  Tsutsumi Takayoshi (Center for Low-temperature Plasma Sciences, Nagoya University, Furo-cho, Chikusa-ku, 464-8601, Nagoya, Japan) ,  Ishikawa Kenji (Center for Low-temperature Plasma Sciences, Nagoya University, Furo-cho, Chikusa-ku, 464-8601, Nagoya, Japan) ,  Hori Masaru (Center for Low-temperature Plasma Sciences, Nagoya University, Furo-cho, Chikusa-ku, 464-8601, Nagoya, Japan)
Material： Carbon
Volume： 170  Page： 93-99  Publication year： 2020 
JST Material Number： H0270B  ISSN： 0008-6223  CODEN： CRBNA  Document type： Article
Article type： 原著論文  Country of issue： United Kingdom (GBR)  Language： ENGLISH (EN)

Abstract/Point： Controlling the layers and in-...

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Thesaurus term： etching ,  electron diffraction ,  thin film ,  plasmon ,  *Oxygen ,  thermochemical reaction ,  Raman spectroscopy ,  electron energy loss spectrum ,  plasma etching ,  transmission electron microscope ,  *graphene ,  diffraction pattern ,  oxygen plasma ,  multilayer graphene
Semi thesaurus term： エッチング速度 , 【Automatic Indexing@JST】

Author keywords (5)： Graphene ,  Layer-by-layer thinning ,  In-situ transmission electron microscopy ,  Raman spectroscopy ,  Remote plasma etching

JST classification (2)： Carbon and its compounds  (YB02060D) ,  Thin films of other inorganic compounds  (BK14060A)

Terms in the title (5)： 室温 ,  酸素 ,  中性粒子 ,  グラフェン ,  科学