Art

J-GLOBAL ID：202002230204936225   Reference number：20A2558615

Laser direct submicron fabrication by controlling reaction time constant of photoresist

フォトレジストの反応時定数制御によるレーザ直接サブミクロン製造【JST・京大機械翻訳】

Author (3)： Ikke Daigo (Department of Electrical and Electronic Engineering, Graduate school of Engineering, Shizuoka University, 3-5-1 Johoku, Naka-ku, Hamamatsu 432-8561, Japan) ,  Murata Shingo (Department of Electrical and Electronic Engineering, Graduate school of Engineering, Shizuoka University, 3-5-1 Johoku, Naka-ku, Hamamatsu 432-8561, Japan) ,  Egami Chikara (Department of Electrical and Electronic Engineering, Graduate school of Engineering, Shizuoka University, 3-5-1 Johoku, Naka-ku, Hamamatsu 432-8561, Japan)
Material： Optics Communications  (Opt Commun)
Volume： 480  Page： Null  Publication year： 2021 
JST Material Number： A0678B  ISSN： 0030-4018  Document type： Article
Article type： 原著論文  Country of issue： Netherlands (NLD)  Language： ENGLISH (EN)

Abstract/Point： This paper focuses on fabricat...

Register(free) or Log In to access     To see more with JDream III (charged).   {{ this.onShowAbsJLink("http://jdream3.com/lp/jglobal/index.html?docNo=20A2558615&from=J-GLOBAL&jstjournalNo=A0678B") }}

Thesaurus term： focusing ,  nonlinear optics ,  *photoresist ,  wavelength ,  photochemical reaction ,  laser beam ,  cw laser ,  time constant ,  three dimension ,  continuous wave ,  fine patterning ,  reaction rate constant ,  beam spot ,  high accuracy

Author keywords (5)： Laser fabrication ,  CW laser ,  Photoresist ,  Nonlinear optics ,  Reaction time constant

JST classification (2)： Optical devices in general  (BD06010L) ,  Manufacturing technology of solid-state devices  (NC03030V)

Terms in the title (4)： フォトレジスト ,  時定数 ,  レーザ ,  サブ