Art

J-GLOBAL ID：202002233163662909   Reference number：20A2353709

Microfabrication Beyond The Diffraction Limit by A Free Electron Laser-New Possibilities of LIPSS-

自由電子レーザによる回折限界を超えた微細加工-LIPSSの新たな可能性-

Author (1)： IRIZAWA AKINORI (大阪大 産科研)
Material： レーザ加工学会誌  (Journal of Japan Laser Processing Society)
Volume： 27  Issue： 3  Page： 155-158  Publication year： Oct. 2020 
JST Material Number： L3905A  ISSN： 1881-6797  Document type： Article
Article type： 解説  Country of issue： Japan (JPN)  Language： JAPANESE (JA)

Thesaurus term： *free electron laser ,  limit ,  fine patterning ,  pulsed laser irradiation ,  *periodic structure ,  surface structure ,  self-organizing ,  terahertz wave ,  far infrared radiation ,  *laser beam machining ,  *surface treatment
Semi thesaurus term： diffraction limit

JST classification (2)： Applications of lasers  (BD04100V) ,  Surface structure of solids in general  (BK15010E)

Reference (25)：

• Okuda, S., Honda, Y., Kimura, N., Ohkuma, J., Yamamoto, T., Suemine, S., Okada, T., Ishida, S., Takeda, S., Tsumori, K. and Hori, T.: Free-electron laser oscillation with a multibunch electron beam of the 38 MeV L-band linear accelerator at ISIR, Nuclear Instruments and Methods in Physics Research Section A, 358 (1-3), (1995), 244.
• Kato, R., Kondo, S., Igo, T., Okita, T., Konishi, T., Suemine, S., Okuda, S. and Isoyama, G.: Lasing at 150μm wavelength and measurement of the characteristics of the free-electron laser at ISIR, Osaka University, Nuclear Instruments and Methods in Physics Research Section A, 445, (1-3), (2000), 169.
• Kashiwagi, S., Kato, R., Mihara, A., Noda, T., Isoyama, G., Tsuchiya, K., Shioya, T. and Yamamoto, S.: Rigorous evaluation of the edge-focusing wiggler based on the magnetic field measurement, Physical Review Special Topics-Accelerators and Beams, 12(12), (2009), 120703.
• Kawase, K., Kato, R., Irizawa, A., Fujimoto, M., Kashiwagi, S., Yamamoto, S., Kamitsukasa, F., Osumi, H., Yaguchi, M., Tokuchi, A. and Suemine, S.: The high-power operation of a terahertz free-electron laser based on a normal conducting RF linac using beam conditioning, Nuclear Instruments and Methods in Physics Research Section A, 726, (2013), 96.
• Suemine, S., Kawase, K., Sugimoto, N., Kashiwagi, S., Furukawa, K., Kato, R., Irizawa, A., Fujimoto, M., Ohsumi, H., Yaguchi, M. and Funakoshi, S.: Nuclear Instruments and Methods in Physics Research A Grid pulser for an electron gun with a thermionic cathode for the high-power operation of a terahertz free-electron laser, Nucl. Inst. Methods Phys. Res. A, 773, (2015), 97.

Terms in the title (4)： 自由電子レーザ ,  回折限界 ,  微細加工 ,  可能性