Art

J-GLOBAL ID：202002246087047303   Reference number：20A1768829

Development of MEMS Tactile Sensation Device for Haptic Robot

触覚ロボットのためのMEMS触感デバイスの開発

Author (5)： Sone Junji (Tokyo Polytechnic University) ,  Matsumoto Yasuyoshi (Tokyo Polytechnic University) ,  Yasuda Yoji (Tokyo Polytechnic University) ,  Hasegawa Shoichi (Precision and Intelligence Laboratory, Tokyo Institute of Technology) ,  Yamada Katsumi (Tokyo Polytechnic University)
Material： Journal of Robotics and Mechatronics  (J Robot Mechatron)
Volume： 32  Issue： 2  Page： 315-322(J-STAGE)  Publication year： 2020 
JST Material Number： L0735A  ISSN： 0915-3942  Document type： Article
Article type： 原著論文  Country of issue： Japan (JPN)  Language： ENGLISH (EN)

Thesaurus term： MEMS ,  input output unit ,  *robot finger ,  *display device ,  wire bonding ,  lead zirconate titanate ,  wet etching ,  microactuator ,  cantilever beam ,  virtual reality ,  tactile sense ,  numerical analysis ,  haptic device ,  *haptic display ,  Finite Element Analysis
Semi thesaurus term： Micro Electro Mechanical System device ,  PZT ,  microcantilever ,  tactile sense ,  FEM analysis

Author keywords (3)： MEMS device ,  tactile sensation ,  haptic sensation robot

JST classification (1)： Design,manufacturing,and components of robots  (IC04013A)

Reference (37)：

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• [2] M. K. O’Malley and R. O. Ambrose, “Haptic feedback applications for Robonaut,” Industrial Robot, Vol.30, No.6, pp. 531-542, 2003.
• [3] J. Sone, K. Ogiwara, Y. Kume, Y. Tokuyama, and M. Isobe, “Force Profile study of Virtual Cutting,” Proc. of 13th Int. Conf. on Artificial Reality and Telexistence, pp. 143-147, 2003.
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• [5] J. Streque, A. Talbi, P. Pernod, and V. Preobrazhensky, “New magnetic microactuator design based on PDMS elastomer and MEMS technologies for tactile display,” IEEE Trans. Haptics, Vol.3, No.2, pp. 88-97, 2010.

Terms in the title (5)： 触覚 ,  ロボット ,  MEMS ,  触感 ,  開発