Waveguide-mode Sensor Chip with Si/SiO<sub>2</sub>/SiO<sub>x</sub> Structure

YASUURA Masato; UENO Koji; ASHIBA Hiroki; NAKAYA Yuki; FUJIMAKI Makoto

Art

J-GLOBAL ID：202002259776899281 Reference number：20A1088093

Waveguide-mode Sensor Chip with Si/SiO₂/SiO_x Structure

Si/SiO₂/SiO_x構造を持つ導波路モードセンサチップ

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Author (5)： , , , ,
Material：
Volume： 32 Issue： 4 (3) Page： 1567-1576 Publication year： 2020
JST Material Number： L0338A ISSN： 0914-4935 CODEN： SENMER Document type： Article
Article type：原著論文 Country of issue： Japan (JPN) Language： ENGLISH (EN)

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Optical waveguide,optical fibers,and fiber optics , Waveguide,coaxial line

Reference (22)：

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Waveguide-mode Sensor Chip with Si/SiO2/SiOx Structure

Waveguide-mode Sensor Chip with Si/SiO₂/SiO_x Structure