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J-GLOBAL ID:202002261940127192   Reference number:20A0844874

精密超音波研磨に関する基礎的研究-第1報-研磨面生成機構の解析-

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Volume: 2020  Issue: 春季(CD-ROM)  Page: ROMBUNNO.L34  Publication year: Mar. 01, 2020 
JST Material Number: Y0914A  Document type: Proceedings
Article type: 短報  Country of issue: Japan (JPN)  Language: JAPANESE (JA)
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