Art

J-GLOBAL ID：202002264167287445   Reference number：20A0579512

Oxygen sensors based on gallium oxide thin films with addition of chromium

クロムを添加した酸化ガリウム薄膜に基づく酸素センサ【JST・京大機械翻訳】

Author (4)： Almaev Aleksei V. (Research and Development Center for Advanced Technologies in Microelectronics, Tomsk State University, Tomsk, 634050, Russia) ,  Chernikov Evgeniy V. (Laboratory of Semiconductor Devices, Kuznetsov Siberian Physical Technical Institute, Tomsk State University, Tomsk, 634050, Russia) ,  Davletkildeev Nadim A. (Omsk Scientific Center of Siberian Branch, Russian Academy of Sciences, Omsk, 644024, Russia) ,  Sokolov Denis V. (Omsk Scientific Center of Siberian Branch, Russian Academy of Sciences, Omsk, 644024, Russia)
Material： Superlattices and Microstructures  (Superlattices Microstruct)
Volume： 139  Page： Null  Publication year： 2020 
JST Material Number： D0600B  ISSN： 0749-6036  Document type： Article
Article type： 原著論文  Country of issue： Netherlands (NLD)  Language： ENGLISH (EN)

Abstract/Point： This article reveals the gas-s...

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Thesaurus term： *chromium ,  nitrogen ,  *oxygen ,  dissociative adsorption ,  beta phase ,  grain boundary ,  catalytic activity ,  polycrystal ,  chromium oxide ,  sensitivity ,  *gallium oxide ,  *thin film ,  membrane structure ,  sensor ,  thin film growth ,  chemisorption

Author keywords (5)： Oxygen sensors ,  Gallium oxide ,  Chromium oxide ,  Thin films ,  Magnetron sputtering

JST classification (4)： Semiconductor thin films  (BK14040E) ,  Oxide thin films  (BK14050P) ,  Luminescence of semiconductors  (BM08092S) ,  Thin films of organic compounds  (BK14070L)

Terms in the title (4)： クロム ,  酸化ガリウム ,  薄膜 ,  酸素センサ