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J-GLOBAL ID:202002266756910313   Reference number:20A1118624

Influence of a thin surface oxide layer on fracture toughness of copper films

銅膜の破壊靱性に及ぼす薄い表面酸化層の影響
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Volume: 2019  Page: 1010B1115(J-STAGE)  Publication year: 2019 
JST Material Number: U1254A  ISSN: 2424-2837  Document type: Proceedings
Article type: 短報  Country of issue: Japan (JPN)  Language: ENGLISH (EN)
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Metallic materials 
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