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J-GLOBAL ID：202002269685561207   Reference number：20A1404158

カーボン系薄膜パターニング基板の作製

Author (4)：
SHIMODA RYOTA

About SHIMODA RYOTA

(日工大)

About 日工大

, 
ISHIHARA MASATO

About ISHIHARA MASATO

(産業技術総合研)

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, 
OKIGAWA YUKI

About OKIGAWA YUKI

(産業技術総合研)

About 産業技術総合研

, 
BAN MASAHITO

About BAN MASAHITO

(日工大)

About 日工大


Material：
表面技術協会講演大会講演要旨集

About 表面技術協会講演大会講演要旨集


Volume： 141st  Page： 55-56  Publication year： Feb. 20, 2020 
JST Material Number： Y0050A  ISSN： 0917-2947  Document type： Proceedings
Article type： 短報  Country of issue： Japan (JPN)  Language： JAPANESE (JA)
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adhesion(bond)

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,...
Semi thesaurus term：
Thesaurus term/Semi thesaurus term
Keywords indexed to the article.
All keywords is available on JDreamIII(charged).
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薄膜形成

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Author keywords (4)：
DLC

About DLC

, 
グラフェン

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, 
プラズマCVD

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, 
細胞培養

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JST classification (1)：
JST classification
Category name(code) classified by JST.
Cell and tissue culture methods 
(EA03040R)

About Cell and tissue culture methods

Terms in the title (4)：
Terms in the title
Keywords automatically extracted from the title.
カーボン

About カーボン

, 
薄膜

About 薄膜

, 
パターニング

About パターニング

, 
作製

About 作製


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