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J-GLOBAL ID：202002272677693200   Reference number：20A0916304

3D Nanoscale Chiral Helixes Fabricated by Focused Helium Ion Beam Manufacturing Process

集束ヘリウムイオンビーム製造プロセスにより作製した3Dナノスケールカイラルヘリックス【JST・京大機械翻訳】

Author (8)： Jin Shengxiao (National Key Laboratory of Micro/Nano Fabrication Technology, Institute of Microelectronics, Peking University,Beijing,P. R. CHINA,100871) ,  Chen Zhuojie (National Key Laboratory of Micro/Nano Fabrication Technology, Institute of Microelectronics, Peking University,Beijing,P. R. CHINA,100871) ,  Chen Xiaoyu (National Key Laboratory of Micro/Nano Fabrication Technology, Institute of Microelectronics, Peking University,Beijing,P. R. CHINA,100871) ,  Zhu Rui (Electron Microscopy Laboratory, Peking University,Beijing,P. R. China,100871) ,  Zhu Jia (National Key Laboratory of Micro/Nano Fabrication Technology, Institute of Microelectronics, Peking University,Beijing,P. R. CHINA,100871) ,  Huang Yun (National Key Laboratory of Micro/Nano Fabrication Technology, Institute of Microelectronics, Peking University,Beijing,P. R. CHINA,100871) ,  Xu Jun (Electron Microscopy Laboratory, Peking University,Beijing,P. R. China,100871) ,  Wu Wengang (National Key Laboratory of Micro/Nano Fabrication Technology, Institute of Microelectronics, Peking University,Beijing,P. R. CHINA,100871)
Material： IEEE Conference Proceedings  (IEEE Conf Proc)
Volume： 2020  Issue： MEMS  Page： 897-900  Publication year： 2020 
JST Material Number： W2441A  Document type： Proceedings
Article type： 原著論文  Country of issue： United States (USA)  Language： ENGLISH (EN)

Abstract/Point： As chiral structures, three-di...

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Thesaurus term： *focusing ,  optical modulator ,  dielectric thin film ,  production management ,  circular dichroism ,  folding(morphology) ,  visible light ,  circularly polarized light ,  optical rotatory power ,  *three dimension ,  *production process ,  focused ion beam ,  nanostructure
Semi thesaurus term： キラリティ ,  高精度 , 【Automatic Indexing@JST】

JST classification (1)： Graphic and image processing in general  (JE04010I)

Terms in the title (6)： 集束 ,  ヘリウム ,  イオンビーム ,  製造プロセス ,  作製 ,  3D