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J-GLOBAL ID：202002279881275877   Reference number：20A0007783

Surface analysis and pumping speed measurements of oxygen-free palladium/titanium nonevaporable getter after heating at 100-450 °C

100~450°Cにおける加熱後の酸素を含まないパラジウム/チタン非蒸発性ゲッターの表面分析とポンピング速度測定【JST・京大機械翻訳】

Author (9)： Miyazawa Tetsuya (Department of Materials Structure Science, SOKENDAI, 1-1 Oho, Tsukuba 305-0801, Japan) ,  Sugawara Yuta (Department of Complexity Science and Engineering, University of Tokyo, 5-1-5 Kashiwanoha, Kashiwa 277-0882, Japan) ,  Yoshikawa Ichiro (Department of Complexity Science and Engineering, University of Tokyo, 5-1-5 Kashiwanoha, Kashiwa 277-0882, Japan) ,  Sato Yuta (Graduate School of Engineering Science, Yokohama National University, 79-5 Tokiwadai, Hodogaya-ku, Yokohama 240-8501, Japan) ,  Ohno Shinya (Graduate School of Engineering Science, Yokohama National University, 79-5 Tokiwadai, Hodogaya-ku, Yokohama 240-8501, Japan) ,  Okada Tomohiro (Graduate School of Education, Tokyo Gakugei University, 4-1-1 Nukui-kita-machi, Koganei-shi 184-8501, Japan) ,  Matsumoto Masuaki (Graduate School of Education, Tokyo Gakugei University, 4-1-1 Nukui-kita-machi, Koganei-shi 184-8501, Japan) ,  Kikuchi Takashi (Institute of Materials Structure Science, KEK, 1-1 Oho, Tsukuba 305-0801, Japan) ,  Mase Kazuhiko (Department of Materials Structure Science, SOKENDAI, 1-1 Oho, Tsukuba 305-0801, Japan)
Material： Journal of Vacuum Science & Technology. B. Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena  (Journal of Vacuum Science & Technology. B. Nanotechnology & Microelectronics: Materials, Processing, Measurement, & Phenomena)
Volume： 37  Issue： 6  Page： 062923-062923-6  Publication year： 2019 
JST Material Number： E0974A  ISSN： 2166-2746  CODEN： JVTBD9  Document type： Article
Article type： 原著論文  Country of issue： United States (USA)  Language： ENGLISH (EN)

Abstract/Point： A novel nonevaporable getter (...

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Thesaurus term： X-ray photoelectron spectroscopy ,  velocity measurement ,  *surface analysis ,  thin film ,  synchrotron radiation ,  *Oxygen ,  carbon dioxide ,  residual gas ,  segregation (concentration distribution) ,  *Palladium ,  vacuum vessel ,  chemical composition ,  *Titanium
Semi thesaurus term： *非蒸発性ゲッタ , 【Automatic Indexing@JST】

JST classification (1)： Semiconductor-metal contacts  (BM03084G)

Terms in the title (7)： 酸素 ,  パラジウム ,  チタン ,  非蒸発性ゲッター ,  表面分析 ,  ポンピング ,  速度測定