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J-GLOBAL ID:202002285210470266   Reference number:20A2239367

Observation of sliding mark on DLC film surface using X-ray photoemission electron microscopy

X線光電子顕微鏡を用いたDLC膜の摺動痕の観察
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Volume: 67th  Page: ROMBUNNO.15a-D221-4  Publication year: Feb. 28, 2020 
JST Material Number: Y0054B  ISSN: 2436-7613  Document type: Proceedings
Article type: 短報  Country of issue: Japan (JPN)  Language: JAPANESE (JA)
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Thin films of other inorganic compounds  ,  Carbon and its compounds 
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