Proj
J-GLOBAL ID:202104010540701520  Research Project code:12103748

長尺基板対応大画面プラズマスパッタシステム

長尺基板対応大画面プラズマスパッタシステム
National award number:JPMJTT12S6
Study period:2012 -
Organization (2):
Corporate responsibility:
Research responsibility: ( , 接合科学研究所, 教授 )
DOI: https://doi.org/10.52926/JPMJTT12S6
Terms in the title (2):
Terms in the title
Keywords automatically extracted from the title.
Research program:
Organization with control over the research:
Japan Science and Technology Agency

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