Proj
J-GLOBAL ID:202104020348718105  Research Project code:10100926

窒化ガリウム(GaN)基板の高能率・ダメージレス平坦化加工技術の開発

窒化ガリウム(GaN)基板の高能率・ダメージレス平坦化加工技術の開発
Study period:2010 - 2012
Organization (2):
Corporate responsibility:
Research responsibility: ( , 大学院工学研究科, 准教授 )
Research program:
Organization with control over the research:
Japan Science and Technology Agency

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