Rchr
J-GLOBAL ID：200901053507837284
Update date: Apr. 04, 2024
Gao Wei
コウ イ | Gao Wei
Affiliation and department：
Job title：
Professor
Homepage URL (2)：
http://web.tohoku.ac.jp/nanometrology/index.html
,
http://web.tohoku.ac.jp/nanometrology/eng/index.html?2018
Research field (3)：
Manufacturing and production engineering
, Machine elements and tribology
, Design engineering
Research keywords (5)：
Applied Optical Metrology
, Precision Nanometrology
, Precision metrology
, Precision Positioning
, Precision measurement of surface profile and error motion
Research theme for competitive and other funds (27)：
- 2022 - 2025 その場波面制御で自在に操る干渉定在波によるサブμm級自由微細構造の大面積露光創成
- 2020 - 2024 光コム次元変換光学とその場自律校正法の創出によるサブアトム級3次元超精密計測
- 2015 - 2020 Frontier of the precision optical metrology created by the ultra-precision optical nano-grid reference artifact and the absolute optical scale comb
- 2015 - 2019 2軸干渉グリッド定在波一括転写と自律的精度保証による次世代光ナノグリッド基準創出
- 2015 - 2017 ダイヤモンドマイクロ切削工具エッジ形状のサブナノメートル超高精度計測法の研究
- 2015 - 2017 Development of an optical method for evaluation of three-dimensional tool edge form with a high resolution beyond the diffraction limit
- 2014 - 2016 A study for sub-nanometer ultra-high precision measurement method of micro cutting edge of diamond tool
- 2012 - 2015 Development of a three-axis laser autocollimator for measurement of angular error motions of a next-generation ultra-precision positioning stage
- 2012 - 2014 A new scanning electrostatic force microscope for noncontact surface profile measurement of micro-specimens of bio-optics
- 2009 - 2011 XYZ three-axis surface encoder with a single measurement point based on interference of diffraction beams
- 2006 - 2008 High Speed and High Precision Measurement of Nanometric 3D Edge Profiles of Next Generation Diamond Micro-Tools
- 2006 - 2007 ナノスケール生産基盤におけるコア計測技術に関する企画調査
- 2004 - 2006 Measurement system of fluctuation map of strength and mechanical properties of nano-scale materials using nano-positioning technique
- 2002 - 2006 Development of a surface encoder for next generation three-axis precision stages
- 2004 - 2005 ナノチューブを用いた次世代3次元ピコインデンターチップに関する研究
- 2003 - 2004 High-accuracy Fabrication of Large Area Micro-Structured Metrology Surface by a Nano-Machining Probe with Surface Profile Measurement Function
- 2002 - 2003 マイクロ角度センサアレイを用いた微小癌触診用小型硬さ分布測定プローブの開発
- 2000 - 2002 An Ultra-precision Measurement System for Next Generation 400 mm Silicon Wafers
- 1999 - 2001 A new method of position and attitude detection based on an angle sensor
- 1999 - 2000 静電容量型2次元角度センサの試作研究
- 1999 - 2000 ソフトウェアデータムによる真円度・直径の機上同時計測に関する研究
- 1998 - 1999 Straightness Measurement of Long Cylinder for Construction of Linear Collider
- 1996 - 1997 Development of Absolute Self-Calibration Systems for Displacement and Profile Measuring Instruments with Subnanometric Accuracy
- 1996 - 1996 エアスピンドルの3次元エラーモーションの動的超精密測定
- 1995 - 1996 Basic Study on Ultra-Precision Self-Profile-Generation
- 1995 - 1995 2次元PSDの高度利用のための自律校正法の研究
- 1995 - 1995 形状誤差と運動誤差の分離によるエアスピンドルの回転運動精度の超精密測定
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Papers (502)：
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Ryo Sato, Tao Liu, Satoru Maehara, Ryota Okimura, Hiraku Matsukuma, Wei Gao. Design of an Optical Head with Two Phase-Shifted Interference Signals for Direction Detection of Small Displacement in an Absolute Surface Encoder. International Journal of Automation Technology. 2024. 18. 2. 249-256
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Tao Liu, Hiraku Matsukuma, Amane Suzuki, Ryo Sato, Wei Gao. Enhanced Data-Processing Algorithms for Dispersive Interferometry Using a Femtosecond Laser. Sensors. 2024. 24. 2. 370-370
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Hiraku Matsukuma, Masashi Nagaoka, Hisashi Hirose, Ryo Sato, Yuki Shimizu, Wei Gao. Repetition Frequency Control of a Mid-Infrared Ultrashort Pulse Laser. International Journal of Automation Technology. 2024. 18. 1. 84-91
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Jiucheng Wu, Yifang Hong, Dong Wook Shin, Ryo Sato, Lue Quan, Hiraku Matsukuma, Wei Gao. On-Machine Calibration of Pitch Deviations of a Linear Scale Grating by Using a Differential Angle Sensor. International Journal of Automation Technology. 2024. 18. 1. 4-10
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Kuangyi Li, Zhiyang Zhang, Jiahui Lin, Ryo Sato, Hiraku Matsukuma, Wei Gao. Angle Measurement Based on Second Harmonic Generation Using Artificial Neural Network. Nanomanufacturing and Metrology. 2023. 6. 1
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MISC (189)：
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Ryo Sato, Xinghui Li, Andreas Fischer, Liang Chia Chen, Chong Chen, Rintaro Shimomura, Wei Gao. Signal Processing and Artificial Intelligence for Dual-Detection Confocal Probes. International Journal of Precision Engineering and Manufacturing. 2023
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Wei Gao, Yuki Shimizu. Optical metrology for precision engineering. Optical Metrology for Precision Engineering. 2021. 1-644
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Yuki Shimizu, Hiraku Matsukuma, Wei Gao. Optical angle sensor technology based on the optical frequency comb laser. Applied Sciences (Switzerland). 2020. 10. 11
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佐藤遼, 清水裕樹, 仲村拓, 松隈啓, 高偉. モード同期レーザーを用いた共焦点プローブ. 光アライアンス. 2020. 31. 2
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松隈啓, 阿隅結夢, 長岡将史, 清水裕樹, 高偉. 中赤外線レーザの開発とレーザオートコリメーション法への適用. 精密工学会大会学術講演会講演論文集. 2020. 2020
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Patents (43)：
Books (10)：
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Surface Metrology for Micro- and Nanofabrication
Elsevier 2020
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計測工学 Measurement and Instrumentation
朝倉書店 2017
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Evaluation of Nanometer Cutting Tool Edge for Nanofabrication
InTech 2011
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Precision Nanometrology : Sensors and Measuring Systems for Nanomanufacturing
Springer 2010
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Precision Control of Planar Motion Stages: Design and Implementation of Precision Motion Control Strategies
VDM Verlag 2010
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Lectures and oral presentations (23)：
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In-situ dimensional metrology of precision parts for smart manufacturing
(2018 IEEE International Conference on Advanced Manufacturing 2018)
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FS-FTS: an innovation of fast tool servo for nano-fabrication and in-process measurement of large-area micro optics
(The 14th China-Japan International Conference on Ultra-Precision Machining Process 2018)
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On-machine and in-process metrology for large-area microptics by using FS-FTS
(4th CIRP Conference on Surface Integrity 2018)
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Precision manufacturing metrology based on scanning probe systems
(The 13th International Symposium on Measurement Technology and Intelligent Instruments 2017)
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In-situ, in-line, on-machine & in-process surface metrology of precision parts
(39th International MATADOR Conference on Advanced Manufacturing 2017)
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Professional career (1)：
- 博士(工学) (Tohoku University)
Awards (29)：
- 2021/03 - 公益社団法人 精密工学会 精密工学会沼田記念論文賞
- 2019/04 - 文部科学省 文部科学大臣表彰 科学技術賞(研究部門) 自律的校正法に基づく精密ナノ計測学の構築と応用の研究
- 2019/03 - 公益社団法人精密工学会 精密工学会沼田記念論文賞 Design and testing of a compact non-orthogonal two-axis Lloyd's mirror interferometer for fabrication of large-area two-dimensional scale grating
- 2018/06 - Paper Award An optical lever by using a mode-locked laser for angle measurement
- 2018/03 - An optical lever by using a mode-locked laser for angle measurement
- 2017/11 - (一社)日本機械学会生産加工・工作機械部門 優秀講演論文表彰 Ultra-precision angle sensor with a mode-locked laser source
- 2017/09 - 第13回計測技術と知的測定機に関する国際会議(ISMTII)組織委員会 Best Paper Award Non-contact detection of surface defects by using a micro thermal sensor
- 2016/08 - 第5回国際ナノ加工に関する国際会議(nanoMan)組織委員会 Spindle Error Motion Measurement of Concentricity Gage by Using Laser Scan Micrometer
- 2015/11 - The Editional and Review Committee of the 11st CJUMP Excellent Paper Award
- 2015/11 - The Editional and Review Committee of the 11st CJUMP Excellent Paper Award Excellent Paper Award
- 2015/06 - 公益社団法人 工作機械技術振興財団 工作機械技術振興賞(論文賞)
- 2014/09/04 - IMEKO Exellent paper award Design of an optical system for evaluation of edge contour of a diamond cutting tool
- 2013/11/07 - 日本機械学会 優秀講演論文表彰 Constrction of a surface profile measurement system by using a nanopipette ball probe with shear-force detection
- 2012/10/27 - 日本機械学会 優秀講演論文表彰 接触型熱検知センサによる平滑面欠陥検出の実験的原理検討
- 2011/03/15 - (社)精密工学会 精密工学会沼田記念論文賞 Design and construction of a two-degree-of-freedom linear encoder for nanometric measurement of stage position and straightness
- 2010/03/17 - 精密工学会 精密工学会論文賞 マイクロ切削工具切れ刃形状の三次元測定装置に関する研究ー測定装置の構築と切れ刃形状測定実験ー
- 2009/12/11 - ASPEN2009 Best Paper Award Development of a highly sensitive angle sensor by using single-cell photodiodes
- 2007/11/01 - International Journal of Precision Engineering and Manufacturing Contribution Award
- 2005/03/04 - (財)ファナックロボット財団 ファナックFAロボット財団論文賞 サーフェスエンコーダのための大面積2次元正弦波格子形状の精密ナノ創成と評価
- 2004/03/17 - (社)精密工学会 精密工学会賞 Precision Nano-fabrication and evaluation of a large sinusoidal grid surface for a surface encoder
- 2004/03/13 - 日本機械学会東北支部 日本機械学会東北支部技術研究賞 マルチプローブ型円筒形状測定機の開発
- 2003/05/23 - The 4th International Conference on Intelligent Processing and Manufacturing of Materials Best Paper in Materials Processing, Ductile Machining Phenomena of Nominally Brittle Materials at the Nanoscale, The 4th International Conference on Intelligent Processing and Manufacturing of Materials
- 2003/03/27 - (社)精密工学会 精密工学会沼田記念論文賞 マルチスポット光源を用いたサーフェスエンコーダの研究
- 2001/03 - 精密工学会 精密工学会学術講演会ベストオーガナイザー賞
- 1999/09/29 - 精密工学会 1999年度精密工学会秋季大会学術講演会ベストプレゼンテーション賞 「多点法におけるゼロ点調整について」
- 1998/09/24 - 精密工学会 精密工学会高城賞 ソフトウエアデータムを利用したオンマシン形状測定に関する研究
- 1998/03/19 - 精密工学会 精密工学会賞 論文:幾何量センサのその場自律校正法の研究、精密工学会誌、63, 10(1997)
- 1997/04/01 - 日本機械学会(JSME) 1996年度日本機械学会奨励賞(研究)(JSME Awards for Young Engineers) オンマシン形状測定(On-machine Profile Measurement)
- 1996/03/12 - トーキン科学技術財団(Tokin Scientific Foundation) 1995年度トーキン科学技術財団研究奨励賞(Award for Young Engineers) 混合法による真直度と真円度の超精密測定(Measurement of Straightness and Roundness by Using the Mixed Method)
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Association Membership(s) (6)：
International Institution for Production Engineering Research (CIRP)
, International Society for Nanomanufacturing
, 国際光学学会(SPIE)
, 日本機械学会
, 米国精密工学会(The American Society for Precision Engineering)
, 精密工学会
