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ArticleJ-GLOBAL ID:200902015596778410整理番号:89A0470221

Tribological properties of diamond films grown by plasma-enhanced chemical vapor deposition.

プラズマ促進化学蒸着により成長させたダイヤモンド膜の摩擦・摩耗特性

著者:WONG M S(Northwestern Univ., IL, USA)、MEILUNAS R(Northwestern Univ., IL, USA)、ONG T P(Northwestern Univ., IL, USA)・・・
資料名:Appl Phys Lett 巻:54 号:20 ページ:2006-2008
発行年:1989年05月15日
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About J-GLOBAL

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J-GLOBAL links information that represents the key to research and development. For example, linking articles and patents with people (authors and inventors) enables the extraction of a sequence of information.
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The system enables searches of similar kinds of content through linkage with external sites.
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