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ArticleJ-GLOBAL ID:200902015723043351整理番号:86A0138126

TiN coating adhesion studies using the scratch test method.

引かき試験法を用いたTiN被覆の付着力の研究

著者:VALLI J(Technical Research Centre of Finland)、MAEKELAE U(Technical Research Centre of Finland)、MATTHEWS A(Univ. Hull, United Kingdom)・・・
資料名:J Vac Sci Technol A 巻:3 号:6 ページ:2411-2414
発行年:1985年11月
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