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J-GLOBAL ID：201702288776833825   Reference number：17A0118555

A damping constant model for proof-mass structure design of MEMS inertial sensor by multi-layer metal technology

多層金属技術によるMEMS慣性センサのプルーフマス構造設計のための減衰定数モデル【Powered by NICT】

Author (7)： Konishi Toshifumi (Nano-Technology Business Unit, NTT Advanced Technology Corporation, Atsugi-shi, Kanagawa, Japan) ,  Safu Teruaki (Nano-Technology Business Unit, NTT Advanced Technology Corporation, Atsugi-shi, Kanagawa, Japan) ,  Machida Katsuyuki (Nano-Technology Business Unit, NTT Advanced Technology Corporation, Atsugi-shi, Kanagawa, Japan) ,  Yamane Daisuke (Laboratory for Future Interdisciplinary Research of Science and Technology, Tokyo Institute of Technology, Yokohama, Kanagawa, Japan) ,  Sone Masato (Laboratory for Future Interdisciplinary Research of Science and Technology, Tokyo Institute of Technology, Yokohama, Kanagawa, Japan) ,  Masu Kazuya (Laboratory for Future Interdisciplinary Research of Science and Technology, Tokyo Institute of Technology, Yokohama, Kanagawa, Japan) ,  Toshiyoshi Hiroshi (Research Center for Advanced Science and Technology, The University of Tokyo, Meguro-ku, Tokyo Japan)
Material： IEEE Conference Proceedings  (IEEE Conf Proc)
Volume： 2016  Issue： SENSORS  Page： 1-3  Publication year： 2016 
JST Material Number： W2441A  Document type： Proceedings
Article type： 原著論文  Country of issue： United States (USA)  Language： ENGLISH (EN)

Abstract/Point： This paper reports a novel dam...

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Thesaurus term： *attenuation constant ,  mechanical noise ,  *MEMS ,  structural parameter ,  etching ,  *structural design ,  *multilayer ,  large area ,  *inertial sensor

JST classification (1)： Measuring methods and instruments of time,speed,acceleration,angular veloc?  (AD05040K)

Terms in the title (7)： 多層 ,  MEMS ,  慣性センサ ,  マス ,  構造設計 ,  減衰定数 ,  モデル