2000 - 2007 Study of three-dimensional nanoimprint technology
論文 (348件):
Saaya Senzaki, Takao Okabe, Jun Taniguchi. Fabrication of bifocal lenses using resin that can be processed by electron beam lithography after ultraviolet-nanoimprint lithography. MICROELECTRONIC ENGINEERING. 2022. 258. 111776-111776
Atsuhiro Furuta, Jun Taniguchi. Fabrication of single layer flexible through-hole electrodes using imprinting. Proceedings of the 10th International Conference on Leading Edge Manufacturing in 21st Century (LEM21). 2021. 130-133
Katsuyuki Yatagawa, Shin Hiwasa and Jun Taniguchi. Fabrication of adhesive water repellency film by nanoimprint lithography. Proceedings of the 10th International Conference on Leading Edge Manufacturing in 21st Century (LEM21). 2021. 134-136
Atsuhiro Furuta, Jun Taiguchi. Lifetime Prediction of Release coating for UV-NIL using Line-patterned Silicon Mold. Proc. of 34th International Microprocesses and Nanotechnology Conference (2021). 2021. P3-3
Saaya Sennzaki, Takao Okabe, Jun Taniguchi. Two-step lithography process via UV-Nanoimprint Lithography and Electron beam lithography for Optical devices. Proc. of the 47th International Conference on Micro and Nano Engineering. 2021. PA12
3D simulation and experiment of the fluid flow around structure with nano step made by UV-NIL
(The 39th International Conference of Photopolymer Science and Technology 2022)
色味のある視野角制御フィルムの作製
(2022年度精密工学会春季大会学術講演会 2022)
Facile Fabrication of Rose-petal-effect Film Using Moth-eye Structure
(The 20th International Conference on Nanoimprint and Nanoprint Technologies (NNT2021) 2021)
Fabrication process and application of moth-eye structure film
(The 20th International Conference on Nanoimprint and Nanoprint Technologies (NNT2021) 2021)
Fabrication of Two-Layer Freestanding Through Hole Electrode Films by Transfer Method
(The 20th International Conference on Nanoimprint and Nanoprint Technologies (NNT2021) 2021)