Crystal Growth of Semiconductor SiC and Material Characterization
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論文 (629件):
Shota Kozakai, Haruki Fujii, Mitsuaki Kaneko, Tsunenobu Kimoto. Depth profiles of electron and hole traps generated by reactive ion etching near the surface of 4H-SiC. Journal of Applied Physics. 2024. 136. 9
Shion Toshimitsu, Keita Tachiki, Mitsuaki Kaneko, Tsunenobu Kimoto. Demonstration of SiC n-channel MOSFETs fabricated on a high-purity semi-insulating substrate and investigation of the short-channel effects. Japanese Journal of Applied Physics. 2024. 63. 9. 090905-090905
Ryoya Ishikawa, Mitsuaki Kaneko, Tsunenobu Kimoto. Estimation of Electron Drift Mobility along the <i>c</i>-Axis in 4H-SiC by Using Vertical Schottky Barrier Diodes. Solid State Phenomena. 2024. 360. 205-210
Koji Ito, Hajime Tanaka, Masahiro Horita, Jun Suda, Tsunenobu Kimoto. Influence of fixed charges and trapped electrons on free electron mobility at 4H-SiC(0001)/SiO2 interfaces with gate oxides annealed in NO or POCl3. Applied Physics Express. 2024. 17. 8. 081003-081003
T. Kimoto, H. Niwa, T. Okuda, E. Saito, Y. Zhao, S. Asada, J. Suda. Carrier lifetime and breakdown phenomena in SiC power device material. Journal of Physics D: Applied Physics. 2018. 51. 36
Tanaka H, Suda J, Kimoto T. Insight into phonon scattering in Si nanowires through high-field hole transport: Impacts of boundary condition and comparison with bulk phonon approximation. Journal of Physics: Conference Series. 2017. 864. 1
Progress and Future Challenges of SiC Power MOSFETs
(5th IEEE Electron Devices Technology and Manufacturing Conference 2021 2021)
WISE Program: Innovation of Advanced Photonic and Electronic Devices
(International Workshop on Education and Research for Future Electronics 2021)
Lateral spreads of Al and P atoms implanted into a high-purity semi-insulating SiC substrate
(2020 International Conference on Solid State Devices and Materials 2020)
High electron mobility along the c-axis in 4H-SiC
(2020 International Conference on Solid State Devices and Materials 2020)
Accurate Determination of Barrier Heights in Heavily-Doped SiC Schottky Barrier Diodes Fabricated with Various Metals
(2020 International Conference on Solid State Devices and Materials 2020)