安田雅昭

ヤスダマサアキ | Yasuda Masaaki

所属機関・部署：
職名：准教授

研究分野 (4件)：電子デバイス、電子機器 , ナノ構造物理 , 結晶工学 , 応用物性

研究キーワード (4件)：電子ビーム応用 , 微細加工 , ナノ計算科学 , Application of Electron Beam

競争的資金等の研究課題 (9件)：

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論文 (148件)：

Kaito Yamada, Yoshihiko Hirai, Masaaki Yasuda. Molecular Dynamics Simulation of Pattern Formation for Negative-Type Resists in Electron Beam Lithography. Journal of Photopolymer Science and Technology. 2024. 37. 1. 75-79
Kyohei Imai, Bunta Inoue, Yoshihiko Hirai, Masaaki Yasuda. Stochastic Simulation Study of Pattern Formation in EUV resists with Photo-Decomposable Quenchers. Journal of Photopolymer Science and Technology. 2024. 37. 1. 109-114
Atsushi Sekiguchi, Hiroko Minami, Masaaki Yasuda, Yoshihiko Hirai. Developing a Laparoscope Lens with Super Water-Repellent Antifouling Function using Biomimetic Materials. Journal of Photopolymer Science and Technology. 2023. 36. 3. 173-182
Masahiro Kusumi, Bunta Inoue, Yoshihiko Hirai, Masaaki Yasuda. Prediction of secondary electron yield for metal materials using deep learning. Microscopy. 2023. 73. 1. 31-36
Chen Tang, Atsushi Sekiguchi, Yosuke Ohta, Yoshihiko Hirai, Masaaki Yasuda. Surface property control for 193 nm immersion resist by addition of Si compound. Journal of Vacuum Science & Technology B. 2023. 41. 1. 012602

MISC (47件)：

書籍 (4件)：

Computational Chemistry: Theories, Methods and Applications
Nova Science Publishers 2014
Advances in Nanotechnology. Volume 11
Nova Science Publishers 2014
Lithography, Capt.26 : Molecular Dynamics Study on Mold and Pattern Breakages in Nanoimprint Lithography
IN-TECH 2010
表面分析技術選書計算シミュレーションと分析データ解析第4・2節電子散乱のシミュレーション
丸善株式会社 2008

講演・口頭発表等 (8件)：

Computational Study of Pattern Formation for Chemically Amplified Resists in Extreme Ultraviolet Lithography
(36th International Conference of Photopolymer Science and Technology 2019)
Computational Study of Pattern Formation in UV Nanoimprint Lithography
(35th Int. Conf. of Photopolym. Sci. and Technol. 2018)
Computational Study of Temperature Distribution in Electron-Irradiated Graphene
(11th Int. Symp. on Atomic Level Characterizations for New Materials and Devices ’17 2017)
Multiscale Simulation of Development Process in Electron Beam Lithography
(34th Int. Conf. of Photopolym. Sci. and Technol. 2017)
Multiphysics Simulation of Nanopatterning in Electron Beam Lithography
(33rd Int. Conf. of Photopolym. Sci. and Technol. 2016)

学歴 (4件)：

学位 (1件)：

委員歴 (7件)：

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所属学会 (4件)：

米国マイクロビームアナリシス学会 , 日本表面真空学会 , 日本顕微鏡学会 , 応用物理学会

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安田 雅昭