安田雅昭

ヤスダマサアキ | Yasuda Masaaki

所属機関・部署：
職名：准教授

研究分野 (4件)：電子デバイス、電子機器 , ナノ構造物理 , 結晶工学 , 応用物性

研究キーワード (4件)：電子ビーム応用 , 微細加工 , ナノ計算科学 , Application of Electron Beam

競争的資金等の研究課題 (9件)：

全件表示

論文 (143件)：

Chen Tang, Atsushi Sekiguchi, Yosuke Ohta, Yoshihiko Hirai, Masaaki Yasuda. Surface property control for 193 nm immersion resist by addition of Si compound. Journal of Vacuum Science & Technology B. 2023. 41. 1. 012602
Yoshihiko Hirai, Sou Tsukamoto, Hidekatsu Tanabe, Kai Kameyama, Hiroaki Kawata, Masaaki Yasuda. Smart Systems for Material and Process Designing in Direct Nanoimprint Lithography Using Hybrid Deep Learning. Nanomaterials. 2022. 12. 15. 2571-2571
Bunta Inoue, Masanori Koyama, Atsushi Sekiguchi, Masamitsu Shirai, Yoshihiko Hirai, Masaaki Yasuda. Stochastic Simulation of Development Process in Electron Beam Lithography. Journal of Photopolymer Science and Technology. 2021. 34. 6. 661-665
M. Koyama, K. Imai, M. Shirai, Y. Hirai, M. Yasuda. Effects of acid diffusion and resist molecular size on line edge roughness for chemically amplified resists in EUV lithography: computational study. Jpn. J. Appl. Phys. 2021. 60. 106505
S. Tsukamoto, H. Tanabe, R. Yamamura, K. Kameyama, H. Kawata, M. Yasuda, Y. Hirai. Proposal of Hybrid Deep Learning System for Process and Material Design in Thermal Nanoimprint Lithography. J. Photopolym. Sci. Technol. 2021. 34. 2. 145-148

MISC (47件)：

書籍 (4件)：

Computational Chemistry: Theories, Methods and Applications
Nova Science Publishers 2014
Advances in Nanotechnology. Volume 11
Nova Science Publishers 2014
Lithography, Capt.26 : Molecular Dynamics Study on Mold and Pattern Breakages in Nanoimprint Lithography
IN-TECH 2010
表面分析技術選書計算シミュレーションと分析データ解析第4・2節電子散乱のシミュレーション
丸善株式会社 2008

講演・口頭発表等 (8件)：

Computational Study of Pattern Formation for Chemically Amplified Resists in Extreme Ultraviolet Lithography
(36th International Conference of Photopolymer Science and Technology 2019)
Computational Study of Pattern Formation in UV Nanoimprint Lithography
(35th Int. Conf. of Photopolym. Sci. and Technol. 2018)
Computational Study of Temperature Distribution in Electron-Irradiated Graphene
(11th Int. Symp. on Atomic Level Characterizations for New Materials and Devices ’17 2017)
Multiscale Simulation of Development Process in Electron Beam Lithography
(34th Int. Conf. of Photopolym. Sci. and Technol. 2017)
Multiphysics Simulation of Nanopatterning in Electron Beam Lithography
(33rd Int. Conf. of Photopolym. Sci. and Technol. 2016)

学歴 (4件)：

学位 (1件)：

委員歴 (7件)：

全件表示

所属学会 (4件)：

米国マイクロビームアナリシス学会 , 日本表面真空学会 , 日本顕微鏡学会 , 応用物理学会

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安田 雅昭