Photoacoustic evaluation of defects and thermal corductivity in the surface layer of ion implcuted layer. Material Science & Engineering B. 2001. B91-92. 186
Photoacoustic evaluation of defects and thermal corductivity in the surface layer of ion implcuted layer. Material Science & Engineering B. 2001. B91-92. 186
A Photoacoustic Study of Thermal Conductivity Annealing Curves for a Silicon Substrate Implanted with Si Ions
Electronics and Commucations in Japan, Part2, 2003