2012 - 2013 Demensinal Measrement of Micro-aperture with a Nanopipette ball probe
2011 - 2011 走査型ナノピペットプローブ顕微鏡を用いたアトリットル堆積量制御法の開発
全件表示
論文 (112件):
Akira Banno, Kimihisa Matsumoto, Kazuhide Kamiya, So Ito. Preparation of Si nanoparticles from bamboo leaves and measurement of their photoluminescence and electroluminescence spectra. Japanese Journal of Applied Physics. 2023. 63. 1. 01SP13-01SP13
Masakazu Aruga, So Ito, Daichi Kato, Kimihisa Matsumoto, Kazuhide Kamiya. Investigation of probing repeatability inside a micro-hole by changing probe approach direction for a local surface interaction force detection type microprobe. Frontiers in Manufacturing Technology. 2023. 3
Masakazu ARUGA, So ITO, Fuma TSUGAWA, Kimihisa MATSUMOTO, Kazuhide KAMIYA. Expansion of measurement area of hand-scraped surface using stitching method for oblique-incident interferometer. Journal of Advanced Mechanical Design, Systems, and Manufacturing. 2023. 17. 1. JAMDSM0010-JAMDSM0010
Kimihisa Matsumoto, Kazuhide Kamiya, So Ito, Hidehiro Yasuda. Preparation of undecanoic acid-terminated Si particles from rice husks. JAPANESE JOURNAL OF APPLIED PHYSICS. 2022. 61. SB
So Ito, Daiki Kameoka, Kimihisa Matsumoto, Kazuhide Kamiya. Design and Development of Oblique-Incident Interferometer for Form Measurement of Hand-Scraped Surfaces. Nanomanufacturing and Metrology. 2021. 4. 69-76
Hideaki TOUYAMA, So ITO. Industry-Academia-Government Collaboration and Regional Revitalization Initiatives through Digital Transformation. Journal of the Japan Society for Precision Engineering. 2023. 89. 1. 17-21
So ITO. Researches on Low-Measurement Force and High-Sensitivity Microprobing Systems. Journal of the Japan Society for Precision Engineering. 2022. 88. 9. 684-687
Handbook of manufacturing
World Scientific 2020 ISBN:9789813271012
Metrology
Springer 2019
講演・口頭発表等 (42件):
Form error measurement of CMM probe tip ball based on interpolation method
(The 15th International Symposium on Measurement Technology and Intelligent Instruments (ISMTII2023) 2023)
Preparation of Si nanoparticles from bamboo leaves and measurement of PL and EL spectra
(The 9th International Symposium on Organic and Inorganic Electronic Materials and Related Nanotechnologies (EM-NANO 2023) 2023)
Three-dimensional measurement of a micro-hole by a microprobing system with method of local surface interaction force detection
(The 19th International Conference on Precision Engineering)
Evaluation of characteristics of microprobing system using detection of surface interaction force
(The 10th International Conference on Leading Edge Manufacturing in 21st Century (LEM21) 2021)
The study of wide-range measurement of the hand-scraped surface plate using a stitching method
(The 10th International Conference on Leading Edge Manufacturing in 21st Century (LEM21) 2021)
2021 - 2023 The Japan Society of Applied Physics (JSAP) Hokuriku-Shin’etsu Chapter The 10th International Symposium on Organic and Inorganic Electronic Materials and Related Nanotechnologies (EM-NANO 2023) Organizing Committee
2020/04 - 2022/03 公益社団法人 応用物理学会 北陸・信越支部 会計幹事(副)
2019 - 2021 The Japan Society of Applied Physics (JSAP) Hokuriku-Shin’etsu Chapter The 8th International Symposium on Organic and Inorganic Electronic Materials and Related Nanotechnologies (EM-NANO 2021) Organizing Committee, Student presentation award judging committee Vice chair