Rchr
J-GLOBAL ID:200901030964938274
Update date: Aug. 26, 2024
Nakatsuka Osamu
ナカツカ オサム | Nakatsuka Osamu
Affiliation and department:
Job title:
Professor
Homepage URL (2):
http://alice.xtal.nagoya-u.ac.jp/nanoeledev/
,
http://alice.xtal.nagoya-u.ac.jp/nanoeledev/e_index.html
Research field (1):
Thin-film surfaces and interfaces
Research keywords (6):
crystalline growth
, thin film
, surface structure
, crystalline structure
, electrical property:electron conduction
, solid state devices
Research theme for competitive and other funds (17):
- 2021 - 2024 Energy band design based on controlling ordered/disordered structure of non-thermal equilibrium group-IV alloy thin films
- 2021 - 2023 Creation of exotic low-dimensional material originated from phyllosilicate and control of its electronic property
- 2019 - 2022 Development of calculation technique for defect control in semiconductors for power device application
- 2016 - 2019 Development of calculation method for physical properties based on the possible atomic configurations and its application to the IV group semiconductor materials
- 2014 - 2019 Establishment of Fundamental Engineering of Sn-related Group-IV Semiconductor Materials for Multi-Functional and Low-Power Electronics
- 2015 - 2018 Synthesis of New Group IV Two Dimensional Materials
- 2015 - 2018 フェルミレベルピニング軽減による金属/ゲルマニウム系材料低抵抗コンタクト
- 2010 - 2013 Design of Electronic Properties and Development of High-Mobility Channel Technology for Low Power/High-Speed Nano-CMOS Devices
- 2009 - 2011 シリコン系エンジニアリングサブストレート実現のための材料・物性・構造制御技術
- 2006 - 2009 Formation technology of ultra-flat metal/Ge contacts with low resistance for Ge electronics
- 2006 - 2009 Construction of High-k Gate/Strain-engineered Germanium channel Structures with Functional Nano-system
- 2006 - 2008 Creation of tensile-strained Ge high-mobility-channel by thermal nonequilibrium process
- 2004 - 2006 Controlling deformation of strained hetero structure of group IV semiconductors for realization of ultra uniform strain fields
- 2003 - 2005 Control of solid-phase reaction dynamics and carbon engineering for nanofabrication of group-IV
- 2001 - 2003 異種材料界面制御による超低抵抗コンタクトの開発と半導体/金属界面の原子直視研究
- 1999 - 2003 人工IV族半導体極微細構造デバイス製作のための原子精度要素プロセスの開発
- 2000 - 2002 Study of low resistance contact structure using composition-modulated interface layer for 0.1-μm generation ULSI
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Papers (379):
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Tatsuro Maeda, Hiroyuki Ishii, Wen Hsin Chang, Shiyu Zhang, Shigehisa Shibayama, Masashi Kurosawa, Osamu Nakatsuka. Layer transfer of epitaxially grown Ge-lattice-matched Si27.8Ge64.2Sn8 films. Materials Science in Semiconductor Processing. 2024
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Tatsuma Hiraide, Shigehisa Shibayama, Masashi Kurosawa, Mitsuo Sakashita, Osamu Nakatsuka. Tensile-strained Ge1-x Sn x layers on Si(001) substrate by solid-phase epitaxy featuring seed layer introduction. Japanese Journal of Applied Physics. 2024
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Masashi Kurosawa, Shigehisa Shibayama, Mitsuo Sakashita, Osamu Nakatsuka. (Invited) Epitaxial Growth Technique for Si1-X Sn x Binary Alloy Thin Films. ECS Meeting Abstracts. 2023
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Jotaro Nagano, Shota Ikeguchi, Takuma Doi, Mitsuo Sakashita, Osamu Nakatsuka, Shigehisa Shibayama. Emergence of ferroelectricity in ZrO2 thin films on TiN/Si featuring high temperature sputtering method. Materials Science in Semiconductor Processing. 2023
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Kaoru Hashimoto, Shigehisa Shibayama, Koji Asaka, Mitsuo Sakashita, Masashi Kurosawa, Osamu Nakatsuka. Self-organized Ge1-x Sn x quantum dots formed on insulators and their room temperature photoluminescence. Japanese Journal of Applied Physics. 2023
more...
MISC (107):
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Jeon Jihee, Suzuki Akihiro, Shibayama Shigehisa, Zaima Shigeaki, Nakatsuka Osamu. Ultra-low resistance contact for n-type Ge[1-x]Sn[x] with in-situ Sb heavily doping and nickel stanogermanide formation (シリコン材料・デバイス). 電子情報通信学会技術研究報告 = IEICE technical report : 信学技報. 2019. 119. 96. 5-9
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Yukihiro Imai, Kouta Takahashi, Noriyuki Uchida, Tatsuro Maeda, Osamu Nakatsuka, Shigeaki Zaima, Masashi Kurosawa. Domain size effects on thermoelectric properties of p-type Ge0.95Sn0.05 layers grown on GaAs and Si substrates. 2018 IEEE Electron Devices Technology and Manufacturing Conference, EDTM 2018 - Proceedings. 2018. 310-312
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Osamu Nakatsuka, Akihiro Suzuki, James McVittie, Yoshio Nishi, Shigeaki Zaima. Formation of epitaxial Hf germanide/Ge contacts for Schottky barrier height engineering. 17th International Workshop on Junction Technology, IWJT 2017. 2017. 47-48
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NiGe/Ge contact formation by microwave annealing method for low-thermal budget processing. 2017. 116. 450. 11-15
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志村 洋介, 竹内 和歌奈, 坂下 満男, 黒澤 昌志, 中塚 理, 財満 鎭明. 招待講演 Sn系IV族半導体混晶薄膜の成長と物性評価 (有機エレクトロニクス). 電子情報通信学会技術研究報告 = IEICE technical report : 信学技報. 2016. 116. 2. 23-26
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Patents (15):
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多層膜構造体およびその形成方法
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p型SiC用電極
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ジャーマナイド薄膜、ジャーマナイド薄膜の作成方法、ジャーマナイド薄膜を備えたゲルマニウム構造体
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伸張歪ゲルマニウム薄膜の作製方法、伸張歪ゲルマニウム薄膜、及び多層膜構造体
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METHOD FOR FABRICATING A SILICIDE FILM, MULTILAYERED INTERMEDIATE STRUCTURE AND MULTILAYERED STURUCTURE
more...
Books (4):
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第3章,第3節,Geエピタキシャル成長と薄膜構造制御
株式会社エヌ・ティー・エス 2013
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Chapter 1.4: Heterostructure Interfaces and Strain
CRC Press 2013
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Chapter 17: Slicide and germanide technology for interconnections in ultra-large-scale integrated (ULSI) applications
Woodhead Publishing 2011
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Chapter 8, Silicide in "Advanced Nanoscale ULSI Interconnects: Fundamentals and Applications"
Springer 2009
Lectures and oral presentations (408):
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Heterostructure design favorable for n+-Ge1-xSnx pseudo-direct transition layer for optoelectronic application
(13th International Symposium on Advanced Plasma Scienceand its Applications for Nitrides and Nanomaterials / 14th International Conference on Plasma-Nano Technology & Science, (ISPlasma2021/IC-PLANTS2021))
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Epitaxial growth of strain-relaxed and high-Sn-content n-Ge1-xSnx on Si(111) substrate with Ge buffer layer
(The 8th Asian Conference on Crystal Growth and Crystal Technology (CGCT))
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コンタクト抵抗率低減のための金属/IV族半導体界面制御技術
(第84回半導体・集積回路技術シンポジウム 2020)
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Crystal Growth of Epitaxial 3C-SiC Thin Film on Si Substrate By Chemical Vapor Deposition using Single Precursor of Vinylsilane
(Pacificrim Meeting on Electrochemical and Solid-State Science (PRiME2020))
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Heteroepitaxy and Strain Engineering of Germanium-Silicon-Tin Ternary Alloy Semiconductor Thin Films for Energy Band Design
(Pacificrim Meeting on Electrochemical and Solid-State Science (PRiME2020))
more...
Education (2):
- - 2000 Nagoya University Graduate School, Division of Engineering Department of Crystalline Materials Science
- - 1997 Nagoya University Graduate School, Division of Engineering Department of Crystalline Materials Science
Professional career (1):
Work history (15):
- 2017/04/01 - 現在 Nagoya University Institute of Materials and Systems for Sustainability Center for Integrated Research of Future Electronics Innovative Devices Section
- 2017/04/01 - 現在 Nagoya University Graduate School of Engineering Materials Physics 1 Professor
- 2016/07/01 - 現在 Graduate School of Engineering, Nagoya University Professor
- 2016/07/01 - 2017/03/31 Nagoya University Graduate School of Engineering Department of Crystalline Materials Science Nano-Structured Device Engineering Professor
- 2015/04/01 - 2016/09/30 Stanford University Department of Electrical Engineering Visiting Associate Professor
- 2010/10/01 - 2016/06/30 Nagoya University Graduate School of Engineering
- 2010/10/01 - 2016/06/30 Nagoya University Graduate School of Engineering Department of Crystalline Materials Science Associate professor
- 2007/05/01 - 2010/09/30 Nagoya University Graduate School of Engineering Department of Crystalline Materials Science Lecturer
- 2007/05/01 - Nagoya University Graduate School of Engineering
- 2007/04/01 - 2007/04/30 Nagoya University EcoTopia Science Institute Nano-Material Science Research Division Assistant Professor
- 2004/04/01 - 2007/04/30 EcoTopia Science Institute, Nagoya UniversityAssistant Professor
- 2004/04/01 - 2007/04/30 EcoTopia Science Institute, Nagoya UniversityAssistant Professor EcoTopia Science Institute Nano-Material Science Research Division Assistant
- 2006/01 - 財団法人 高輝度光科学研究センター 外来研究員(兼職)
- 2001/06 - 2004/03 Center for Integrated Research in Science and Engineering, Nagoya UniversityAssistant Professor
- 2000/04 - 2001/05 Venture Business Laboratory, Kyoto UniversityPost Doctoral Fellow
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Awards (5):
- 2016/04/06 - Japanese Jouranal Applied Physcis APEX/JJAP Editorial Contribution Award
- 2015/09/28 - SSDM Organizing Committee SSDM Paper Award 2015 Operations of CMOS Inverter and Ring Oscillator Composed of Ultra-Thin Body Poly-Ge p- and n-MISFETs for Stacked Channel 3D-IC
- 2015/09/17 - ADMETA Committee ADMETA Technical Achievement Award 2014 Formation of Epitaxial NiGe Layer on Ge(001) Substrate and Influence of Interface Structure on Schottky Barrier Height
- 2008/05/13 - The fourth International SiGe Technology and Device Meeting ISTDM 2008 Best Poster Award
- 2006/11/10 - 東京工業大学精密工学研究所 第3回 P&I パテントコンテスト:パテント・オブ・ザ・イヤープロセス・テクノロジー部門
Association Membership(s) (4):
日本真空協会
, 日本結晶成長学会
, 日本表面科学会
, The Japan Society of Applied Physics
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